12/28/2010	11:33:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	11:33:48 AM	Recipe started at 11:33 AM
12/28/2010	11:33:49 AM	Helium valve closed
12/28/2010	11:33:49 AM	H2 valve closed
12/28/2010	11:33:49 AM	BCl3 valve closed
12/28/2010	11:33:49 AM	PH3 valve closed
12/28/2010	11:33:49 AM	SiCl4 pre valve closed
12/28/2010	11:33:49 AM	SiCl4 post valve closed
12/28/2010	11:33:49 AM	Main Vac valve closed
12/28/2010	11:33:49 AM	Bubbler valve closed
12/28/2010	11:33:49 AM	Bypass valve opened
12/28/2010	11:33:49 AM	Helium MFC set to  0.000000
12/28/2010	11:33:49 AM	H2 MFC set to  0.000000
12/28/2010	11:33:49 AM	BCl3 MFC set to  0.000000
12/28/2010	11:33:49 AM	PHl3 MFC set to  0.000000
12/28/2010	11:33:49 AM	SiCl4 MFC set to  0.000000
12/28/2010	11:33:49 AM	Bypass solenoid MFC set to  0.000000
12/28/2010	11:33:49 AM	Tube furnace set to 0
12/28/2010	11:33:49 AM	Helium valve closed
12/28/2010	11:33:49 AM	H2 valve closed
12/28/2010	11:33:49 AM	BCl3 valve closed
12/28/2010	11:33:49 AM	PH3 valve closed
12/28/2010	11:33:49 AM	SiCl4 pre valve closed
12/28/2010	11:33:49 AM	SiCl4 post valve closed
12/28/2010	11:33:49 AM	Bubbler valve closed
12/28/2010	11:33:49 AM	Main Vac valve opened
12/28/2010	11:33:49 AM	Bypass valve opened
12/28/2010	11:33:49 AM	Helium MFC set to  0.000000
12/28/2010	11:33:49 AM	H2 MFC set to  0.000000
12/28/2010	11:33:49 AM	BCl3 MFC set to  0.000000
12/28/2010	11:33:49 AM	PHl3 MFC set to  0.000000
12/28/2010	11:33:49 AM	SiCl4 MFC set to  0.000000
12/28/2010	11:33:49 AM	Bypass solenoid MFC set to  0.000000
12/28/2010	11:33:49 AM	Tube furnace set to 0
12/28/2010	11:33:49 AM	Run finished at 11:33 AM
12/28/2010	11:33:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	11:36:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	11:36:20 AM	Recipe started at 11:36 AM
12/28/2010	11:36:20 AM	H2 valve closed
12/28/2010	11:36:20 AM	BCl3 valve closed
12/28/2010	11:36:20 AM	PH3 valve closed
12/28/2010	11:36:20 AM	SiCl4 pre valve closed
12/28/2010	11:36:20 AM	SiCl4 post valve closed
12/28/2010	11:36:20 AM	Main Vac valve closed
12/28/2010	11:36:20 AM	Bypass valve closed
12/28/2010	11:36:20 AM	Bubbler valve closed
12/28/2010	11:36:20 AM	Helium valve opened
12/28/2010	11:36:20 AM	Helium MFC set to  500.000000
12/28/2010	11:36:20 AM	H2 MFC set to  0.000000
12/28/2010	11:36:20 AM	BCl3 MFC set to  0.000000
12/28/2010	11:36:20 AM	PHl3 MFC set to  0.000000
12/28/2010	11:36:20 AM	SiCl4 MFC set to  0.000000
12/28/2010	11:36:20 AM	Bypass solenoid MFC set to  0.000000
12/28/2010	11:36:20 AM	Tube furnace set to 0
12/28/2010	11:39:27 AM	Run aborted at 11:39 AM
12/28/2010	11:39:27 AM	Helium valve closed
12/28/2010	11:39:27 AM	H2 valve closed
12/28/2010	11:39:27 AM	BCl3 valve closed
12/28/2010	11:39:27 AM	PH3 valve closed
12/28/2010	11:39:27 AM	SiCl4 pre valve closed
12/28/2010	11:39:27 AM	SiCl4 post valve closed
12/28/2010	11:39:27 AM	Bypass valve closed
12/28/2010	11:39:27 AM	Main Vac valve closed
12/28/2010	11:39:27 AM	Bubbler valve closed
12/28/2010	11:39:27 AM	Helium MFC set to  0.000000
12/28/2010	11:39:27 AM	H2 MFC set to  0.000000
12/28/2010	11:39:27 AM	BCl3 MFC set to  0.000000
12/28/2010	11:39:27 AM	PHl3 MFC set to  0.000000
12/28/2010	11:39:27 AM	SiCl4 MFC set to  0.000000
12/28/2010	11:39:27 AM	Tube furnace set to 0
12/28/2010	11:39:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	11:45:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	11:45:26 AM	Recipe started at 11:45 AM
12/28/2010	11:45:26 AM	H2 valve closed
12/28/2010	11:45:26 AM	BCl3 valve closed
12/28/2010	11:45:26 AM	PH3 valve closed
12/28/2010	11:45:26 AM	SiCl4 pre valve closed
12/28/2010	11:45:26 AM	SiCl4 post valve closed
12/28/2010	11:45:26 AM	Main Vac valve closed
12/28/2010	11:45:26 AM	Bypass valve closed
12/28/2010	11:45:26 AM	Bubbler valve closed
12/28/2010	11:45:26 AM	Helium valve opened
12/28/2010	11:45:26 AM	Helium MFC set to  500.000000
12/28/2010	11:45:26 AM	H2 MFC set to  0.000000
12/28/2010	11:45:26 AM	BCl3 MFC set to  0.000000
12/28/2010	11:45:26 AM	PHl3 MFC set to  0.000000
12/28/2010	11:45:26 AM	SiCl4 MFC set to  0.000000
12/28/2010	11:45:26 AM	Bypass solenoid MFC set to  0.000000
12/28/2010	11:45:26 AM	Tube furnace set to 0
12/28/2010	11:46:43 AM	Helium valve closed
12/28/2010	11:46:43 AM	H2 valve closed
12/28/2010	11:46:43 AM	BCl3 valve closed
12/28/2010	11:46:43 AM	PH3 valve closed
12/28/2010	11:46:43 AM	SiCl4 pre valve closed
12/28/2010	11:46:43 AM	SiCl4 post valve closed
12/28/2010	11:46:43 AM	Main Vac valve closed
12/28/2010	11:46:43 AM	Bypass valve closed
12/28/2010	11:46:43 AM	Bubbler valve closed
12/28/2010	11:46:43 AM	Helium MFC set to  0.000000
12/28/2010	11:46:43 AM	H2 MFC set to  0.000000
12/28/2010	11:46:43 AM	BCl3 MFC set to  0.000000
12/28/2010	11:46:43 AM	PHl3 MFC set to  0.000000
12/28/2010	11:46:43 AM	SiCl4 MFC set to  0.000000
12/28/2010	11:46:43 AM	Bypass solenoid MFC set to  0.000000
12/28/2010	11:46:43 AM	Tube furnace set to 0
12/28/2010	11:46:44 AM	Run finished at 11:46 AM
12/28/2010	11:46:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	12:11:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	12:11:51 PM	Recipe started at 12:11 PM
12/28/2010	12:11:51 PM	Helium valve closed
12/28/2010	12:11:51 PM	H2 valve closed
12/28/2010	12:11:51 PM	BCl3 valve closed
12/28/2010	12:11:51 PM	PH3 valve closed
12/28/2010	12:11:51 PM	SiCl4 pre valve closed
12/28/2010	12:11:51 PM	SiCl4 post valve closed
12/28/2010	12:11:51 PM	Main Vac valve closed
12/28/2010	12:11:51 PM	Bubbler valve closed
12/28/2010	12:11:51 PM	Bypass valve opened
12/28/2010	12:11:51 PM	Helium MFC set to  0.000000
12/28/2010	12:11:51 PM	H2 MFC set to  0.000000
12/28/2010	12:11:51 PM	BCl3 MFC set to  0.000000
12/28/2010	12:11:51 PM	PHl3 MFC set to  0.000000
12/28/2010	12:11:51 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:11:51 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:11:51 PM	Tube furnace set to 0
12/28/2010	12:12:52 PM	Helium valve closed
12/28/2010	12:12:52 PM	H2 valve closed
12/28/2010	12:12:52 PM	BCl3 valve closed
12/28/2010	12:12:52 PM	PH3 valve closed
12/28/2010	12:12:52 PM	SiCl4 pre valve closed
12/28/2010	12:12:52 PM	SiCl4 post valve closed
12/28/2010	12:12:52 PM	Bubbler valve closed
12/28/2010	12:12:52 PM	Main Vac valve opened
12/28/2010	12:12:52 PM	Bypass valve opened
12/28/2010	12:12:52 PM	Helium MFC set to  0.000000
12/28/2010	12:12:52 PM	H2 MFC set to  0.000000
12/28/2010	12:12:52 PM	BCl3 MFC set to  0.000000
12/28/2010	12:12:52 PM	PHl3 MFC set to  0.000000
12/28/2010	12:12:52 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:12:52 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:12:52 PM	Tube furnace set to 0
12/28/2010	12:12:52 PM	Run finished at 12:12 PM
12/28/2010	12:12:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	12:13:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	12:13:59 PM	Recipe started at 12:13 PM
12/28/2010	12:13:59 PM	Helium valve closed
12/28/2010	12:13:59 PM	H2 valve closed
12/28/2010	12:13:59 PM	BCl3 valve closed
12/28/2010	12:13:59 PM	PH3 valve closed
12/28/2010	12:13:59 PM	SiCl4 pre valve closed
12/28/2010	12:13:59 PM	SiCl4 post valve closed
12/28/2010	12:13:59 PM	Main Vac valve closed
12/28/2010	12:13:59 PM	Bubbler valve closed
12/28/2010	12:13:59 PM	Bypass valve opened
12/28/2010	12:13:59 PM	Helium MFC set to  0.000000
12/28/2010	12:13:59 PM	H2 MFC set to  0.000000
12/28/2010	12:13:59 PM	BCl3 MFC set to  0.000000
12/28/2010	12:13:59 PM	PHl3 MFC set to  0.000000
12/28/2010	12:13:59 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:13:59 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:13:59 PM	Tube furnace set to 0
12/28/2010	12:13:59 PM	Helium valve closed
12/28/2010	12:13:59 PM	H2 valve closed
12/28/2010	12:13:59 PM	BCl3 valve closed
12/28/2010	12:13:59 PM	PH3 valve closed
12/28/2010	12:13:59 PM	SiCl4 pre valve closed
12/28/2010	12:13:59 PM	SiCl4 post valve closed
12/28/2010	12:13:59 PM	Bubbler valve closed
12/28/2010	12:13:59 PM	Main Vac valve opened
12/28/2010	12:13:59 PM	Bypass valve opened
12/28/2010	12:13:59 PM	Helium MFC set to  0.000000
12/28/2010	12:13:59 PM	H2 MFC set to  0.000000
12/28/2010	12:13:59 PM	BCl3 MFC set to  0.000000
12/28/2010	12:13:59 PM	PHl3 MFC set to  0.000000
12/28/2010	12:13:59 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:13:59 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:13:59 PM	Tube furnace set to 0
12/28/2010	12:14:59 PM	H2 valve closed
12/28/2010	12:14:59 PM	BCl3 valve closed
12/28/2010	12:14:59 PM	PH3 valve closed
12/28/2010	12:14:59 PM	SiCl4 pre valve closed
12/28/2010	12:14:59 PM	SiCl4 post valve closed
12/28/2010	12:14:59 PM	Bubbler valve closed
12/28/2010	12:14:59 PM	Helium valve opened
12/28/2010	12:14:59 PM	Main Vac valve opened
12/28/2010	12:14:59 PM	Bypass valve opened
12/28/2010	12:14:59 PM	Helium MFC set to  100.000000
12/28/2010	12:14:59 PM	H2 MFC set to  0.000000
12/28/2010	12:14:59 PM	BCl3 MFC set to  0.000000
12/28/2010	12:14:59 PM	PHl3 MFC set to  0.000000
12/28/2010	12:14:59 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:14:59 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:15:00 PM	Tube furnace set to 0
12/28/2010	12:16:00 PM	Helium valve closed
12/28/2010	12:16:00 PM	H2 valve closed
12/28/2010	12:16:00 PM	BCl3 valve closed
12/28/2010	12:16:00 PM	PH3 valve closed
12/28/2010	12:16:00 PM	SiCl4 pre valve closed
12/28/2010	12:16:00 PM	SiCl4 post valve closed
12/28/2010	12:16:00 PM	Bubbler valve closed
12/28/2010	12:16:00 PM	Main Vac valve opened
12/28/2010	12:16:00 PM	Bypass valve opened
12/28/2010	12:16:00 PM	Helium MFC set to  0.000000
12/28/2010	12:16:00 PM	H2 MFC set to  0.000000
12/28/2010	12:16:00 PM	BCl3 MFC set to  0.000000
12/28/2010	12:16:00 PM	PHl3 MFC set to  0.000000
12/28/2010	12:16:00 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:16:00 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:16:00 PM	Tube furnace set to 0
12/28/2010	12:17:00 PM	H2 valve closed
12/28/2010	12:17:00 PM	BCl3 valve closed
12/28/2010	12:17:00 PM	PH3 valve closed
12/28/2010	12:17:00 PM	SiCl4 pre valve closed
12/28/2010	12:17:00 PM	SiCl4 post valve closed
12/28/2010	12:17:00 PM	Bubbler valve closed
12/28/2010	12:17:00 PM	Helium valve opened
12/28/2010	12:17:00 PM	Main Vac valve opened
12/28/2010	12:17:00 PM	Bypass valve opened
12/28/2010	12:17:00 PM	Helium MFC set to  100.000000
12/28/2010	12:17:00 PM	H2 MFC set to  0.000000
12/28/2010	12:17:00 PM	BCl3 MFC set to  0.000000
12/28/2010	12:17:00 PM	PHl3 MFC set to  0.000000
12/28/2010	12:17:00 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:17:00 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:17:00 PM	Tube furnace set to 0
12/28/2010	12:18:00 PM	Helium valve closed
12/28/2010	12:18:00 PM	H2 valve closed
12/28/2010	12:18:00 PM	BCl3 valve closed
12/28/2010	12:18:00 PM	PH3 valve closed
12/28/2010	12:18:00 PM	SiCl4 pre valve closed
12/28/2010	12:18:00 PM	SiCl4 post valve closed
12/28/2010	12:18:00 PM	Bubbler valve closed
12/28/2010	12:18:00 PM	Main Vac valve opened
12/28/2010	12:18:00 PM	Bypass valve opened
12/28/2010	12:18:00 PM	Helium MFC set to  0.000000
12/28/2010	12:18:00 PM	H2 MFC set to  0.000000
12/28/2010	12:18:00 PM	BCl3 MFC set to  0.000000
12/28/2010	12:18:00 PM	PHl3 MFC set to  0.000000
12/28/2010	12:18:00 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:18:00 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:18:00 PM	Tube furnace set to 0
12/28/2010	12:19:00 PM	H2 valve closed
12/28/2010	12:19:00 PM	BCl3 valve closed
12/28/2010	12:19:00 PM	PH3 valve closed
12/28/2010	12:19:00 PM	SiCl4 pre valve closed
12/28/2010	12:19:00 PM	SiCl4 post valve closed
12/28/2010	12:19:00 PM	Bubbler valve closed
12/28/2010	12:19:00 PM	Helium valve opened
12/28/2010	12:19:00 PM	Main Vac valve opened
12/28/2010	12:19:00 PM	Bypass valve opened
12/28/2010	12:19:00 PM	Helium MFC set to  100.000000
12/28/2010	12:19:00 PM	H2 MFC set to  0.000000
12/28/2010	12:19:00 PM	BCl3 MFC set to  0.000000
12/28/2010	12:19:00 PM	PHl3 MFC set to  0.000000
12/28/2010	12:19:00 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:19:00 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:19:00 PM	Tube furnace set to 0
12/28/2010	12:20:00 PM	Helium valve closed
12/28/2010	12:20:00 PM	H2 valve closed
12/28/2010	12:20:00 PM	BCl3 valve closed
12/28/2010	12:20:00 PM	PH3 valve closed
12/28/2010	12:20:00 PM	SiCl4 pre valve closed
12/28/2010	12:20:00 PM	SiCl4 post valve closed
12/28/2010	12:20:00 PM	Bubbler valve closed
12/28/2010	12:20:00 PM	Main Vac valve opened
12/28/2010	12:20:00 PM	Bypass valve opened
12/28/2010	12:20:00 PM	Helium MFC set to  0.000000
12/28/2010	12:20:00 PM	H2 MFC set to  0.000000
12/28/2010	12:20:00 PM	BCl3 MFC set to  0.000000
12/28/2010	12:20:00 PM	PHl3 MFC set to  0.000000
12/28/2010	12:20:00 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:20:00 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:20:01 PM	Tube furnace set to 0
12/28/2010	12:21:01 PM	H2 valve closed
12/28/2010	12:21:01 PM	BCl3 valve closed
12/28/2010	12:21:01 PM	PH3 valve closed
12/28/2010	12:21:01 PM	SiCl4 pre valve closed
12/28/2010	12:21:01 PM	SiCl4 post valve closed
12/28/2010	12:21:01 PM	Bubbler valve closed
12/28/2010	12:21:01 PM	Helium valve opened
12/28/2010	12:21:01 PM	Main Vac valve opened
12/28/2010	12:21:01 PM	Bypass valve opened
12/28/2010	12:21:01 PM	Helium MFC set to  100.000000
12/28/2010	12:21:01 PM	H2 MFC set to  0.000000
12/28/2010	12:21:01 PM	BCl3 MFC set to  0.000000
12/28/2010	12:21:01 PM	PHl3 MFC set to  0.000000
12/28/2010	12:21:01 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:21:01 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:21:01 PM	Tube furnace set to 0
12/28/2010	12:22:01 PM	Helium valve closed
12/28/2010	12:22:01 PM	H2 valve closed
12/28/2010	12:22:01 PM	BCl3 valve closed
12/28/2010	12:22:01 PM	PH3 valve closed
12/28/2010	12:22:01 PM	SiCl4 pre valve closed
12/28/2010	12:22:01 PM	SiCl4 post valve closed
12/28/2010	12:22:01 PM	Bubbler valve closed
12/28/2010	12:22:01 PM	Main Vac valve opened
12/28/2010	12:22:01 PM	Bypass valve opened
12/28/2010	12:22:01 PM	Helium MFC set to  0.000000
12/28/2010	12:22:01 PM	H2 MFC set to  0.000000
12/28/2010	12:22:01 PM	BCl3 MFC set to  0.000000
12/28/2010	12:22:01 PM	PHl3 MFC set to  0.000000
12/28/2010	12:22:01 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:22:01 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:22:01 PM	Tube furnace set to 0
12/28/2010	12:23:01 PM	H2 valve closed
12/28/2010	12:23:01 PM	BCl3 valve closed
12/28/2010	12:23:01 PM	PH3 valve closed
12/28/2010	12:23:01 PM	SiCl4 pre valve closed
12/28/2010	12:23:01 PM	SiCl4 post valve closed
12/28/2010	12:23:01 PM	Bubbler valve closed
12/28/2010	12:23:01 PM	Helium valve opened
12/28/2010	12:23:01 PM	Main Vac valve opened
12/28/2010	12:23:01 PM	Bypass valve opened
12/28/2010	12:23:01 PM	Helium MFC set to  100.000000
12/28/2010	12:23:01 PM	H2 MFC set to  0.000000
12/28/2010	12:23:01 PM	BCl3 MFC set to  0.000000
12/28/2010	12:23:01 PM	PHl3 MFC set to  0.000000
12/28/2010	12:23:01 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:23:01 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:23:01 PM	Tube furnace set to 0
12/28/2010	12:24:01 PM	Helium valve closed
12/28/2010	12:24:01 PM	H2 valve closed
12/28/2010	12:24:01 PM	BCl3 valve closed
12/28/2010	12:24:01 PM	PH3 valve closed
12/28/2010	12:24:01 PM	SiCl4 pre valve closed
12/28/2010	12:24:01 PM	SiCl4 post valve closed
12/28/2010	12:24:01 PM	Bubbler valve closed
12/28/2010	12:24:01 PM	Main Vac valve opened
12/28/2010	12:24:01 PM	Bypass valve opened
12/28/2010	12:24:01 PM	Helium MFC set to  0.000000
12/28/2010	12:24:01 PM	H2 MFC set to  0.000000
12/28/2010	12:24:01 PM	BCl3 MFC set to  0.000000
12/28/2010	12:24:01 PM	PHl3 MFC set to  0.000000
12/28/2010	12:24:01 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:24:01 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:24:01 PM	Tube furnace set to 0
12/28/2010	12:25:01 PM	H2 valve closed
12/28/2010	12:25:01 PM	BCl3 valve closed
12/28/2010	12:25:01 PM	PH3 valve closed
12/28/2010	12:25:01 PM	SiCl4 pre valve closed
12/28/2010	12:25:01 PM	SiCl4 post valve closed
12/28/2010	12:25:01 PM	Bubbler valve closed
12/28/2010	12:25:01 PM	Helium valve opened
12/28/2010	12:25:01 PM	Main Vac valve opened
12/28/2010	12:25:01 PM	Bypass valve opened
12/28/2010	12:25:01 PM	Helium MFC set to  100.000000
12/28/2010	12:25:01 PM	H2 MFC set to  0.000000
12/28/2010	12:25:01 PM	BCl3 MFC set to  0.000000
12/28/2010	12:25:01 PM	PHl3 MFC set to  0.000000
12/28/2010	12:25:01 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:25:01 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:25:02 PM	Tube furnace set to 0
12/28/2010	12:26:02 PM	Helium valve closed
12/28/2010	12:26:02 PM	H2 valve closed
12/28/2010	12:26:02 PM	BCl3 valve closed
12/28/2010	12:26:02 PM	PH3 valve closed
12/28/2010	12:26:02 PM	SiCl4 pre valve closed
12/28/2010	12:26:02 PM	SiCl4 post valve closed
12/28/2010	12:26:02 PM	Bubbler valve closed
12/28/2010	12:26:02 PM	Main Vac valve opened
12/28/2010	12:26:02 PM	Bypass valve opened
12/28/2010	12:26:02 PM	Helium MFC set to  0.000000
12/28/2010	12:26:02 PM	H2 MFC set to  0.000000
12/28/2010	12:26:02 PM	BCl3 MFC set to  0.000000
12/28/2010	12:26:02 PM	PHl3 MFC set to  0.000000
12/28/2010	12:26:02 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:26:02 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:26:02 PM	Tube furnace set to 0
12/28/2010	12:27:02 PM	H2 valve closed
12/28/2010	12:27:02 PM	BCl3 valve closed
12/28/2010	12:27:02 PM	PH3 valve closed
12/28/2010	12:27:02 PM	SiCl4 pre valve closed
12/28/2010	12:27:02 PM	SiCl4 post valve closed
12/28/2010	12:27:02 PM	Bubbler valve closed
12/28/2010	12:27:02 PM	Helium valve opened
12/28/2010	12:27:02 PM	Main Vac valve opened
12/28/2010	12:27:02 PM	Bypass valve opened
12/28/2010	12:27:02 PM	Helium MFC set to  100.000000
12/28/2010	12:27:02 PM	H2 MFC set to  0.000000
12/28/2010	12:27:02 PM	BCl3 MFC set to  0.000000
12/28/2010	12:27:02 PM	PHl3 MFC set to  0.000000
12/28/2010	12:27:02 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:27:02 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:27:02 PM	Tube furnace set to 0
12/28/2010	12:28:02 PM	Helium valve closed
12/28/2010	12:28:02 PM	H2 valve closed
12/28/2010	12:28:02 PM	BCl3 valve closed
12/28/2010	12:28:02 PM	PH3 valve closed
12/28/2010	12:28:02 PM	SiCl4 pre valve closed
12/28/2010	12:28:02 PM	SiCl4 post valve closed
12/28/2010	12:28:02 PM	Bubbler valve closed
12/28/2010	12:28:02 PM	Main Vac valve opened
12/28/2010	12:28:02 PM	Bypass valve opened
12/28/2010	12:28:02 PM	Helium MFC set to  0.000000
12/28/2010	12:28:02 PM	H2 MFC set to  0.000000
12/28/2010	12:28:02 PM	BCl3 MFC set to  0.000000
12/28/2010	12:28:02 PM	PHl3 MFC set to  0.000000
12/28/2010	12:28:02 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:28:02 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:28:02 PM	Tube furnace set to 0
12/28/2010	12:29:02 PM	H2 valve closed
12/28/2010	12:29:02 PM	BCl3 valve closed
12/28/2010	12:29:02 PM	PH3 valve closed
12/28/2010	12:29:02 PM	SiCl4 pre valve closed
12/28/2010	12:29:02 PM	SiCl4 post valve closed
12/28/2010	12:29:02 PM	Bubbler valve closed
12/28/2010	12:29:02 PM	Helium valve opened
12/28/2010	12:29:02 PM	Main Vac valve opened
12/28/2010	12:29:02 PM	Bypass valve opened
12/28/2010	12:29:02 PM	Helium MFC set to  100.000000
12/28/2010	12:29:02 PM	H2 MFC set to  0.000000
12/28/2010	12:29:02 PM	BCl3 MFC set to  0.000000
12/28/2010	12:29:02 PM	PHl3 MFC set to  0.000000
12/28/2010	12:29:02 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:29:02 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:29:02 PM	Tube furnace set to 0
12/28/2010	12:30:02 PM	Helium valve closed
12/28/2010	12:30:02 PM	H2 valve closed
12/28/2010	12:30:02 PM	BCl3 valve closed
12/28/2010	12:30:02 PM	PH3 valve closed
12/28/2010	12:30:02 PM	SiCl4 pre valve closed
12/28/2010	12:30:02 PM	SiCl4 post valve closed
12/28/2010	12:30:02 PM	Bubbler valve closed
12/28/2010	12:30:02 PM	Main Vac valve opened
12/28/2010	12:30:02 PM	Bypass valve opened
12/28/2010	12:30:02 PM	Helium MFC set to  0.000000
12/28/2010	12:30:02 PM	H2 MFC set to  0.000000
12/28/2010	12:30:02 PM	BCl3 MFC set to  0.000000
12/28/2010	12:30:02 PM	PHl3 MFC set to  0.000000
12/28/2010	12:30:02 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:30:02 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:30:03 PM	Tube furnace set to 0
12/28/2010	12:31:03 PM	H2 valve closed
12/28/2010	12:31:03 PM	BCl3 valve closed
12/28/2010	12:31:03 PM	PH3 valve closed
12/28/2010	12:31:03 PM	SiCl4 pre valve closed
12/28/2010	12:31:03 PM	SiCl4 post valve closed
12/28/2010	12:31:03 PM	Bubbler valve closed
12/28/2010	12:31:03 PM	Helium valve opened
12/28/2010	12:31:03 PM	Main Vac valve opened
12/28/2010	12:31:03 PM	Bypass valve opened
12/28/2010	12:31:03 PM	Helium MFC set to  100.000000
12/28/2010	12:31:03 PM	H2 MFC set to  0.000000
12/28/2010	12:31:03 PM	BCl3 MFC set to  0.000000
12/28/2010	12:31:03 PM	PHl3 MFC set to  0.000000
12/28/2010	12:31:03 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:31:03 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:31:03 PM	Tube furnace set to 0
12/28/2010	12:32:03 PM	Helium valve closed
12/28/2010	12:32:03 PM	H2 valve closed
12/28/2010	12:32:03 PM	BCl3 valve closed
12/28/2010	12:32:03 PM	PH3 valve closed
12/28/2010	12:32:03 PM	SiCl4 pre valve closed
12/28/2010	12:32:03 PM	SiCl4 post valve closed
12/28/2010	12:32:03 PM	Bubbler valve closed
12/28/2010	12:32:03 PM	Main Vac valve opened
12/28/2010	12:32:03 PM	Bypass valve opened
12/28/2010	12:32:03 PM	Helium MFC set to  0.000000
12/28/2010	12:32:03 PM	H2 MFC set to  0.000000
12/28/2010	12:32:03 PM	BCl3 MFC set to  0.000000
12/28/2010	12:32:03 PM	PHl3 MFC set to  0.000000
12/28/2010	12:32:03 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:32:03 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:32:03 PM	Tube furnace set to 0
12/28/2010	12:33:03 PM	H2 valve closed
12/28/2010	12:33:03 PM	BCl3 valve closed
12/28/2010	12:33:03 PM	PH3 valve closed
12/28/2010	12:33:03 PM	SiCl4 pre valve closed
12/28/2010	12:33:03 PM	SiCl4 post valve closed
12/28/2010	12:33:03 PM	Bubbler valve closed
12/28/2010	12:33:03 PM	Helium valve opened
12/28/2010	12:33:03 PM	Main Vac valve opened
12/28/2010	12:33:03 PM	Bypass valve opened
12/28/2010	12:33:03 PM	Helium MFC set to  100.000000
12/28/2010	12:33:03 PM	H2 MFC set to  0.000000
12/28/2010	12:33:03 PM	BCl3 MFC set to  0.000000
12/28/2010	12:33:03 PM	PHl3 MFC set to  0.000000
12/28/2010	12:33:03 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:33:03 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:33:03 PM	Tube furnace set to 0
12/28/2010	12:34:03 PM	Helium valve closed
12/28/2010	12:34:03 PM	H2 valve closed
12/28/2010	12:34:03 PM	BCl3 valve closed
12/28/2010	12:34:03 PM	PH3 valve closed
12/28/2010	12:34:03 PM	SiCl4 pre valve closed
12/28/2010	12:34:03 PM	SiCl4 post valve closed
12/28/2010	12:34:03 PM	Bubbler valve closed
12/28/2010	12:34:03 PM	Main Vac valve opened
12/28/2010	12:34:03 PM	Bypass valve opened
12/28/2010	12:34:03 PM	Helium MFC set to  0.000000
12/28/2010	12:34:03 PM	H2 MFC set to  0.000000
12/28/2010	12:34:03 PM	BCl3 MFC set to  0.000000
12/28/2010	12:34:03 PM	PHl3 MFC set to  0.000000
12/28/2010	12:34:03 PM	SiCl4 MFC set to  0.000000
12/28/2010	12:34:03 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	12:34:04 PM	Tube furnace set to 0
12/28/2010	12:34:05 PM	Run finished at 12:34 PM
12/28/2010	12:34:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	2:07:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	2:07:15 PM	Recipe started at 2:07 PM
12/28/2010	2:07:15 PM	Helium valve closed
12/28/2010	2:07:15 PM	H2 valve closed
12/28/2010	2:07:15 PM	BCl3 valve closed
12/28/2010	2:07:15 PM	PH3 valve closed
12/28/2010	2:07:15 PM	SiCl4 pre valve closed
12/28/2010	2:07:15 PM	SiCl4 post valve closed
12/28/2010	2:07:15 PM	Main Vac valve closed
12/28/2010	2:07:15 PM	Bypass valve closed
12/28/2010	2:07:15 PM	Bubbler valve closed
12/28/2010	2:07:15 PM	Helium MFC set to  0.000000
12/28/2010	2:07:15 PM	H2 MFC set to  0.000000
12/28/2010	2:07:15 PM	BCl3 MFC set to  0.000000
12/28/2010	2:07:15 PM	PHl3 MFC set to  0.000000
12/28/2010	2:07:15 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:07:15 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:07:15 PM	Tube furnace set to 0
12/28/2010	2:07:15 PM	Run finished at 2:07 PM
12/28/2010	2:07:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	2:08:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	2:08:15 PM	Recipe started at 2:08 PM
12/28/2010	2:08:15 PM	Helium valve closed
12/28/2010	2:08:15 PM	H2 valve closed
12/28/2010	2:08:15 PM	BCl3 valve closed
12/28/2010	2:08:15 PM	PH3 valve closed
12/28/2010	2:08:15 PM	SiCl4 pre valve closed
12/28/2010	2:08:15 PM	SiCl4 post valve closed
12/28/2010	2:08:15 PM	Main Vac valve closed
12/28/2010	2:08:15 PM	Bubbler valve closed
12/28/2010	2:08:15 PM	Bypass valve opened
12/28/2010	2:08:15 PM	Helium MFC set to  0.000000
12/28/2010	2:08:15 PM	H2 MFC set to  0.000000
12/28/2010	2:08:15 PM	BCl3 MFC set to  0.000000
12/28/2010	2:08:15 PM	PHl3 MFC set to  0.000000
12/28/2010	2:08:15 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:08:15 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:08:15 PM	Tube furnace set to 0
12/28/2010	2:08:16 PM	Helium valve closed
12/28/2010	2:08:16 PM	H2 valve closed
12/28/2010	2:08:16 PM	BCl3 valve closed
12/28/2010	2:08:16 PM	PH3 valve closed
12/28/2010	2:08:16 PM	SiCl4 pre valve closed
12/28/2010	2:08:16 PM	SiCl4 post valve closed
12/28/2010	2:08:16 PM	Bubbler valve closed
12/28/2010	2:08:16 PM	Main Vac valve opened
12/28/2010	2:08:16 PM	Bypass valve opened
12/28/2010	2:08:16 PM	Helium MFC set to  0.000000
12/28/2010	2:08:16 PM	H2 MFC set to  0.000000
12/28/2010	2:08:16 PM	BCl3 MFC set to  0.000000
12/28/2010	2:08:16 PM	PHl3 MFC set to  0.000000
12/28/2010	2:08:16 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:08:16 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:08:16 PM	Tube furnace set to 0
12/28/2010	2:08:16 PM	Run finished at 2:08 PM
12/28/2010	2:08:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	2:09:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	2:09:05 PM	Recipe started at 2:09 PM
12/28/2010	2:09:05 PM	Helium valve closed
12/28/2010	2:09:05 PM	H2 valve closed
12/28/2010	2:09:05 PM	BCl3 valve closed
12/28/2010	2:09:05 PM	PH3 valve closed
12/28/2010	2:09:05 PM	SiCl4 pre valve closed
12/28/2010	2:09:05 PM	SiCl4 post valve closed
12/28/2010	2:09:05 PM	Main Vac valve closed
12/28/2010	2:09:05 PM	Bypass valve closed
12/28/2010	2:09:05 PM	Bubbler valve closed
12/28/2010	2:09:05 PM	Helium MFC set to  0.000000
12/28/2010	2:09:05 PM	H2 MFC set to  0.000000
12/28/2010	2:09:05 PM	BCl3 MFC set to  0.000000
12/28/2010	2:09:05 PM	PHl3 MFC set to  0.000000
12/28/2010	2:09:05 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:09:05 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:09:05 PM	Tube furnace set to 0
12/28/2010	2:09:05 PM	Run finished at 2:09 PM
12/28/2010	2:09:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	2:09:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	2:09:21 PM	Recipe started at 2:09 PM
12/28/2010	2:09:21 PM	H2 valve closed
12/28/2010	2:09:21 PM	BCl3 valve closed
12/28/2010	2:09:21 PM	PH3 valve closed
12/28/2010	2:09:21 PM	SiCl4 pre valve closed
12/28/2010	2:09:21 PM	SiCl4 post valve closed
12/28/2010	2:09:21 PM	Main Vac valve closed
12/28/2010	2:09:21 PM	Bypass valve closed
12/28/2010	2:09:21 PM	Bubbler valve closed
12/28/2010	2:09:21 PM	Helium valve opened
12/28/2010	2:09:21 PM	Helium MFC set to  500.000000
12/28/2010	2:09:21 PM	H2 MFC set to  0.000000
12/28/2010	2:09:21 PM	BCl3 MFC set to  0.000000
12/28/2010	2:09:21 PM	PHl3 MFC set to  0.000000
12/28/2010	2:09:21 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:09:21 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:09:22 PM	Tube furnace set to 0
12/28/2010	2:10:41 PM	Helium valve closed
12/28/2010	2:10:41 PM	H2 valve closed
12/28/2010	2:10:41 PM	BCl3 valve closed
12/28/2010	2:10:41 PM	PH3 valve closed
12/28/2010	2:10:41 PM	SiCl4 pre valve closed
12/28/2010	2:10:41 PM	SiCl4 post valve closed
12/28/2010	2:10:41 PM	Main Vac valve closed
12/28/2010	2:10:41 PM	Bypass valve closed
12/28/2010	2:10:41 PM	Bubbler valve closed
12/28/2010	2:10:41 PM	Helium MFC set to  0.000000
12/28/2010	2:10:41 PM	H2 MFC set to  0.000000
12/28/2010	2:10:41 PM	BCl3 MFC set to  0.000000
12/28/2010	2:10:41 PM	PHl3 MFC set to  0.000000
12/28/2010	2:10:41 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:10:41 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:10:41 PM	Tube furnace set to 0
12/28/2010	2:10:41 PM	Run finished at 2:10 PM
12/28/2010	2:10:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	2:26:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	2:26:14 PM	Recipe started at 2:26 PM
12/28/2010	2:26:14 PM	Helium valve closed
12/28/2010	2:26:14 PM	H2 valve closed
12/28/2010	2:26:14 PM	BCl3 valve closed
12/28/2010	2:26:14 PM	PH3 valve closed
12/28/2010	2:26:14 PM	SiCl4 pre valve closed
12/28/2010	2:26:14 PM	SiCl4 post valve closed
12/28/2010	2:26:14 PM	Main Vac valve closed
12/28/2010	2:26:14 PM	Bubbler valve closed
12/28/2010	2:26:14 PM	Bypass valve opened
12/28/2010	2:26:14 PM	Helium MFC set to  0.000000
12/28/2010	2:26:14 PM	H2 MFC set to  0.000000
12/28/2010	2:26:14 PM	BCl3 MFC set to  0.000000
12/28/2010	2:26:14 PM	PHl3 MFC set to  0.000000
12/28/2010	2:26:14 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:26:14 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:26:15 PM	Tube furnace set to 0
12/28/2010	2:28:12 PM	Helium valve closed
12/28/2010	2:28:12 PM	H2 valve closed
12/28/2010	2:28:12 PM	BCl3 valve closed
12/28/2010	2:28:12 PM	PH3 valve closed
12/28/2010	2:28:12 PM	SiCl4 pre valve closed
12/28/2010	2:28:12 PM	SiCl4 post valve closed
12/28/2010	2:28:12 PM	Bubbler valve closed
12/28/2010	2:28:12 PM	Main Vac valve opened
12/28/2010	2:28:12 PM	Bypass valve opened
12/28/2010	2:28:12 PM	Helium MFC set to  0.000000
12/28/2010	2:28:12 PM	H2 MFC set to  0.000000
12/28/2010	2:28:12 PM	BCl3 MFC set to  0.000000
12/28/2010	2:28:12 PM	PHl3 MFC set to  0.000000
12/28/2010	2:28:12 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:28:12 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:28:13 PM	Tube furnace set to 0
12/28/2010	2:28:13 PM	Run finished at 2:28 PM
12/28/2010	2:28:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	2:33:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	2:33:19 PM	Recipe started at 2:33 PM
12/28/2010	2:33:19 PM	Helium valve closed
12/28/2010	2:33:19 PM	H2 valve closed
12/28/2010	2:33:19 PM	BCl3 valve closed
12/28/2010	2:33:19 PM	PH3 valve closed
12/28/2010	2:33:19 PM	SiCl4 pre valve closed
12/28/2010	2:33:19 PM	SiCl4 post valve closed
12/28/2010	2:33:19 PM	Main Vac valve closed
12/28/2010	2:33:19 PM	Bypass valve closed
12/28/2010	2:33:19 PM	Bubbler valve closed
12/28/2010	2:33:19 PM	Helium MFC set to  0.000000
12/28/2010	2:33:19 PM	H2 MFC set to  0.000000
12/28/2010	2:33:19 PM	BCl3 MFC set to  0.000000
12/28/2010	2:33:19 PM	PHl3 MFC set to  0.000000
12/28/2010	2:33:19 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:33:19 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:33:19 PM	Tube furnace set to 0
12/28/2010	2:33:19 PM	Run finished at 2:33 PM
12/28/2010	2:33:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	2:33:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	2:33:46 PM	Recipe started at 2:33 PM
12/28/2010	2:33:46 PM	Helium valve closed
12/28/2010	2:33:46 PM	H2 valve closed
12/28/2010	2:33:46 PM	BCl3 valve closed
12/28/2010	2:33:46 PM	PH3 valve closed
12/28/2010	2:33:46 PM	SiCl4 pre valve closed
12/28/2010	2:33:46 PM	SiCl4 post valve closed
12/28/2010	2:33:46 PM	Main Vac valve closed
12/28/2010	2:33:46 PM	Bubbler valve closed
12/28/2010	2:33:46 PM	Bypass valve opened
12/28/2010	2:33:46 PM	Helium MFC set to  0.000000
12/28/2010	2:33:46 PM	H2 MFC set to  0.000000
12/28/2010	2:33:46 PM	BCl3 MFC set to  0.000000
12/28/2010	2:33:46 PM	PHl3 MFC set to  0.000000
12/28/2010	2:33:46 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:33:46 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:33:47 PM	Tube furnace set to 0
12/28/2010	2:33:47 PM	Helium valve closed
12/28/2010	2:33:47 PM	H2 valve closed
12/28/2010	2:33:47 PM	BCl3 valve closed
12/28/2010	2:33:47 PM	PH3 valve closed
12/28/2010	2:33:47 PM	SiCl4 pre valve closed
12/28/2010	2:33:47 PM	SiCl4 post valve closed
12/28/2010	2:33:47 PM	Bubbler valve closed
12/28/2010	2:33:47 PM	Main Vac valve opened
12/28/2010	2:33:47 PM	Bypass valve opened
12/28/2010	2:33:47 PM	Helium MFC set to  0.000000
12/28/2010	2:33:47 PM	H2 MFC set to  0.000000
12/28/2010	2:33:47 PM	BCl3 MFC set to  0.000000
12/28/2010	2:33:47 PM	PHl3 MFC set to  0.000000
12/28/2010	2:33:47 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:33:47 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:33:47 PM	Tube furnace set to 0
12/28/2010	2:34:47 PM	H2 valve closed
12/28/2010	2:34:47 PM	BCl3 valve closed
12/28/2010	2:34:47 PM	PH3 valve closed
12/28/2010	2:34:47 PM	SiCl4 pre valve closed
12/28/2010	2:34:47 PM	SiCl4 post valve closed
12/28/2010	2:34:47 PM	Bubbler valve closed
12/28/2010	2:34:47 PM	Helium valve opened
12/28/2010	2:34:47 PM	Main Vac valve opened
12/28/2010	2:34:47 PM	Bypass valve opened
12/28/2010	2:34:47 PM	Helium MFC set to  100.000000
12/28/2010	2:34:47 PM	H2 MFC set to  0.000000
12/28/2010	2:34:47 PM	BCl3 MFC set to  0.000000
12/28/2010	2:34:47 PM	PHl3 MFC set to  0.000000
12/28/2010	2:34:47 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:34:47 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:34:47 PM	Tube furnace set to 0
12/28/2010	2:35:47 PM	Helium valve closed
12/28/2010	2:35:47 PM	H2 valve closed
12/28/2010	2:35:47 PM	BCl3 valve closed
12/28/2010	2:35:47 PM	PH3 valve closed
12/28/2010	2:35:47 PM	SiCl4 pre valve closed
12/28/2010	2:35:47 PM	SiCl4 post valve closed
12/28/2010	2:35:47 PM	Bubbler valve closed
12/28/2010	2:35:47 PM	Main Vac valve opened
12/28/2010	2:35:47 PM	Bypass valve opened
12/28/2010	2:35:47 PM	Helium MFC set to  0.000000
12/28/2010	2:35:47 PM	H2 MFC set to  0.000000
12/28/2010	2:35:47 PM	BCl3 MFC set to  0.000000
12/28/2010	2:35:47 PM	PHl3 MFC set to  0.000000
12/28/2010	2:35:47 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:35:47 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:35:47 PM	Tube furnace set to 0
12/28/2010	2:36:47 PM	H2 valve closed
12/28/2010	2:36:47 PM	BCl3 valve closed
12/28/2010	2:36:47 PM	PH3 valve closed
12/28/2010	2:36:47 PM	SiCl4 pre valve closed
12/28/2010	2:36:47 PM	SiCl4 post valve closed
12/28/2010	2:36:47 PM	Bubbler valve closed
12/28/2010	2:36:47 PM	Helium valve opened
12/28/2010	2:36:47 PM	Main Vac valve opened
12/28/2010	2:36:47 PM	Bypass valve opened
12/28/2010	2:36:47 PM	Helium MFC set to  100.000000
12/28/2010	2:36:47 PM	H2 MFC set to  0.000000
12/28/2010	2:36:47 PM	BCl3 MFC set to  0.000000
12/28/2010	2:36:47 PM	PHl3 MFC set to  0.000000
12/28/2010	2:36:47 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:36:47 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:36:48 PM	Tube furnace set to 0
12/28/2010	2:37:48 PM	Helium valve closed
12/28/2010	2:37:48 PM	H2 valve closed
12/28/2010	2:37:48 PM	BCl3 valve closed
12/28/2010	2:37:48 PM	PH3 valve closed
12/28/2010	2:37:48 PM	SiCl4 pre valve closed
12/28/2010	2:37:48 PM	SiCl4 post valve closed
12/28/2010	2:37:48 PM	Bubbler valve closed
12/28/2010	2:37:48 PM	Main Vac valve opened
12/28/2010	2:37:48 PM	Bypass valve opened
12/28/2010	2:37:48 PM	Helium MFC set to  0.000000
12/28/2010	2:37:48 PM	H2 MFC set to  0.000000
12/28/2010	2:37:48 PM	BCl3 MFC set to  0.000000
12/28/2010	2:37:48 PM	PHl3 MFC set to  0.000000
12/28/2010	2:37:48 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:37:48 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:37:48 PM	Tube furnace set to 0
12/28/2010	2:38:48 PM	H2 valve closed
12/28/2010	2:38:48 PM	BCl3 valve closed
12/28/2010	2:38:48 PM	PH3 valve closed
12/28/2010	2:38:48 PM	SiCl4 pre valve closed
12/28/2010	2:38:48 PM	SiCl4 post valve closed
12/28/2010	2:38:48 PM	Bubbler valve closed
12/28/2010	2:38:48 PM	Helium valve opened
12/28/2010	2:38:48 PM	Main Vac valve opened
12/28/2010	2:38:48 PM	Bypass valve opened
12/28/2010	2:38:48 PM	Helium MFC set to  100.000000
12/28/2010	2:38:48 PM	H2 MFC set to  0.000000
12/28/2010	2:38:48 PM	BCl3 MFC set to  0.000000
12/28/2010	2:38:48 PM	PHl3 MFC set to  0.000000
12/28/2010	2:38:48 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:38:48 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:38:48 PM	Tube furnace set to 0
12/28/2010	2:39:48 PM	Helium valve closed
12/28/2010	2:39:48 PM	H2 valve closed
12/28/2010	2:39:48 PM	BCl3 valve closed
12/28/2010	2:39:48 PM	PH3 valve closed
12/28/2010	2:39:48 PM	SiCl4 pre valve closed
12/28/2010	2:39:48 PM	SiCl4 post valve closed
12/28/2010	2:39:48 PM	Bubbler valve closed
12/28/2010	2:39:48 PM	Main Vac valve opened
12/28/2010	2:39:48 PM	Bypass valve opened
12/28/2010	2:39:48 PM	Helium MFC set to  0.000000
12/28/2010	2:39:48 PM	H2 MFC set to  0.000000
12/28/2010	2:39:48 PM	BCl3 MFC set to  0.000000
12/28/2010	2:39:48 PM	PHl3 MFC set to  0.000000
12/28/2010	2:39:48 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:39:48 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:39:48 PM	Tube furnace set to 0
12/28/2010	2:40:48 PM	H2 valve closed
12/28/2010	2:40:48 PM	BCl3 valve closed
12/28/2010	2:40:48 PM	PH3 valve closed
12/28/2010	2:40:48 PM	SiCl4 pre valve closed
12/28/2010	2:40:48 PM	SiCl4 post valve closed
12/28/2010	2:40:48 PM	Bubbler valve closed
12/28/2010	2:40:48 PM	Helium valve opened
12/28/2010	2:40:48 PM	Main Vac valve opened
12/28/2010	2:40:48 PM	Bypass valve opened
12/28/2010	2:40:48 PM	Helium MFC set to  100.000000
12/28/2010	2:40:48 PM	H2 MFC set to  0.000000
12/28/2010	2:40:48 PM	BCl3 MFC set to  0.000000
12/28/2010	2:40:48 PM	PHl3 MFC set to  0.000000
12/28/2010	2:40:48 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:40:48 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:40:48 PM	Tube furnace set to 0
12/28/2010	2:41:48 PM	Helium valve closed
12/28/2010	2:41:48 PM	H2 valve closed
12/28/2010	2:41:48 PM	BCl3 valve closed
12/28/2010	2:41:48 PM	PH3 valve closed
12/28/2010	2:41:48 PM	SiCl4 pre valve closed
12/28/2010	2:41:48 PM	SiCl4 post valve closed
12/28/2010	2:41:48 PM	Bubbler valve closed
12/28/2010	2:41:48 PM	Main Vac valve opened
12/28/2010	2:41:48 PM	Bypass valve opened
12/28/2010	2:41:48 PM	Helium MFC set to  0.000000
12/28/2010	2:41:48 PM	H2 MFC set to  0.000000
12/28/2010	2:41:48 PM	BCl3 MFC set to  0.000000
12/28/2010	2:41:48 PM	PHl3 MFC set to  0.000000
12/28/2010	2:41:48 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:41:48 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:41:49 PM	Tube furnace set to 0
12/28/2010	2:42:49 PM	H2 valve closed
12/28/2010	2:42:49 PM	BCl3 valve closed
12/28/2010	2:42:49 PM	PH3 valve closed
12/28/2010	2:42:49 PM	SiCl4 pre valve closed
12/28/2010	2:42:49 PM	SiCl4 post valve closed
12/28/2010	2:42:49 PM	Bubbler valve closed
12/28/2010	2:42:49 PM	Helium valve opened
12/28/2010	2:42:49 PM	Main Vac valve opened
12/28/2010	2:42:49 PM	Bypass valve opened
12/28/2010	2:42:49 PM	Helium MFC set to  100.000000
12/28/2010	2:42:49 PM	H2 MFC set to  0.000000
12/28/2010	2:42:49 PM	BCl3 MFC set to  0.000000
12/28/2010	2:42:49 PM	PHl3 MFC set to  0.000000
12/28/2010	2:42:49 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:42:49 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:42:49 PM	Tube furnace set to 0
12/28/2010	2:43:49 PM	Helium valve closed
12/28/2010	2:43:49 PM	H2 valve closed
12/28/2010	2:43:49 PM	BCl3 valve closed
12/28/2010	2:43:49 PM	PH3 valve closed
12/28/2010	2:43:49 PM	SiCl4 pre valve closed
12/28/2010	2:43:49 PM	SiCl4 post valve closed
12/28/2010	2:43:49 PM	Bubbler valve closed
12/28/2010	2:43:49 PM	Main Vac valve opened
12/28/2010	2:43:49 PM	Bypass valve opened
12/28/2010	2:43:49 PM	Helium MFC set to  0.000000
12/28/2010	2:43:49 PM	H2 MFC set to  0.000000
12/28/2010	2:43:49 PM	BCl3 MFC set to  0.000000
12/28/2010	2:43:49 PM	PHl3 MFC set to  0.000000
12/28/2010	2:43:49 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:43:49 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:43:49 PM	Tube furnace set to 0
12/28/2010	2:44:49 PM	H2 valve closed
12/28/2010	2:44:49 PM	BCl3 valve closed
12/28/2010	2:44:49 PM	PH3 valve closed
12/28/2010	2:44:49 PM	SiCl4 pre valve closed
12/28/2010	2:44:49 PM	SiCl4 post valve closed
12/28/2010	2:44:49 PM	Bubbler valve closed
12/28/2010	2:44:49 PM	Helium valve opened
12/28/2010	2:44:49 PM	Main Vac valve opened
12/28/2010	2:44:49 PM	Bypass valve opened
12/28/2010	2:44:49 PM	Helium MFC set to  100.000000
12/28/2010	2:44:49 PM	H2 MFC set to  0.000000
12/28/2010	2:44:49 PM	BCl3 MFC set to  0.000000
12/28/2010	2:44:49 PM	PHl3 MFC set to  0.000000
12/28/2010	2:44:49 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:44:49 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:44:49 PM	Tube furnace set to 0
12/28/2010	2:45:49 PM	Helium valve closed
12/28/2010	2:45:49 PM	H2 valve closed
12/28/2010	2:45:49 PM	BCl3 valve closed
12/28/2010	2:45:49 PM	PH3 valve closed
12/28/2010	2:45:49 PM	SiCl4 pre valve closed
12/28/2010	2:45:49 PM	SiCl4 post valve closed
12/28/2010	2:45:49 PM	Bubbler valve closed
12/28/2010	2:45:49 PM	Main Vac valve opened
12/28/2010	2:45:49 PM	Bypass valve opened
12/28/2010	2:45:49 PM	Helium MFC set to  0.000000
12/28/2010	2:45:49 PM	H2 MFC set to  0.000000
12/28/2010	2:45:49 PM	BCl3 MFC set to  0.000000
12/28/2010	2:45:49 PM	PHl3 MFC set to  0.000000
12/28/2010	2:45:49 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:45:49 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:45:49 PM	Tube furnace set to 0
12/28/2010	2:46:50 PM	H2 valve closed
12/28/2010	2:46:50 PM	BCl3 valve closed
12/28/2010	2:46:50 PM	PH3 valve closed
12/28/2010	2:46:50 PM	SiCl4 pre valve closed
12/28/2010	2:46:50 PM	SiCl4 post valve closed
12/28/2010	2:46:50 PM	Bubbler valve closed
12/28/2010	2:46:50 PM	Helium valve opened
12/28/2010	2:46:50 PM	Main Vac valve opened
12/28/2010	2:46:50 PM	Bypass valve opened
12/28/2010	2:46:50 PM	Helium MFC set to  100.000000
12/28/2010	2:46:50 PM	H2 MFC set to  0.000000
12/28/2010	2:46:50 PM	BCl3 MFC set to  0.000000
12/28/2010	2:46:50 PM	PHl3 MFC set to  0.000000
12/28/2010	2:46:50 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:46:50 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:46:50 PM	Tube furnace set to 0
12/28/2010	2:47:50 PM	Helium valve closed
12/28/2010	2:47:50 PM	H2 valve closed
12/28/2010	2:47:50 PM	BCl3 valve closed
12/28/2010	2:47:50 PM	PH3 valve closed
12/28/2010	2:47:50 PM	SiCl4 pre valve closed
12/28/2010	2:47:50 PM	SiCl4 post valve closed
12/28/2010	2:47:50 PM	Bubbler valve closed
12/28/2010	2:47:50 PM	Main Vac valve opened
12/28/2010	2:47:50 PM	Bypass valve opened
12/28/2010	2:47:50 PM	Helium MFC set to  0.000000
12/28/2010	2:47:50 PM	H2 MFC set to  0.000000
12/28/2010	2:47:50 PM	BCl3 MFC set to  0.000000
12/28/2010	2:47:50 PM	PHl3 MFC set to  0.000000
12/28/2010	2:47:50 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:47:50 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:47:50 PM	Tube furnace set to 0
12/28/2010	2:48:50 PM	H2 valve closed
12/28/2010	2:48:50 PM	BCl3 valve closed
12/28/2010	2:48:50 PM	PH3 valve closed
12/28/2010	2:48:50 PM	SiCl4 pre valve closed
12/28/2010	2:48:50 PM	SiCl4 post valve closed
12/28/2010	2:48:50 PM	Bubbler valve closed
12/28/2010	2:48:50 PM	Helium valve opened
12/28/2010	2:48:50 PM	Main Vac valve opened
12/28/2010	2:48:50 PM	Bypass valve opened
12/28/2010	2:48:50 PM	Helium MFC set to  100.000000
12/28/2010	2:48:50 PM	H2 MFC set to  0.000000
12/28/2010	2:48:50 PM	BCl3 MFC set to  0.000000
12/28/2010	2:48:50 PM	PHl3 MFC set to  0.000000
12/28/2010	2:48:50 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:48:50 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:48:50 PM	Tube furnace set to 0
12/28/2010	2:49:50 PM	Helium valve closed
12/28/2010	2:49:50 PM	H2 valve closed
12/28/2010	2:49:50 PM	BCl3 valve closed
12/28/2010	2:49:50 PM	PH3 valve closed
12/28/2010	2:49:50 PM	SiCl4 pre valve closed
12/28/2010	2:49:50 PM	SiCl4 post valve closed
12/28/2010	2:49:50 PM	Bubbler valve closed
12/28/2010	2:49:50 PM	Main Vac valve opened
12/28/2010	2:49:50 PM	Bypass valve opened
12/28/2010	2:49:50 PM	Helium MFC set to  0.000000
12/28/2010	2:49:50 PM	H2 MFC set to  0.000000
12/28/2010	2:49:50 PM	BCl3 MFC set to  0.000000
12/28/2010	2:49:50 PM	PHl3 MFC set to  0.000000
12/28/2010	2:49:50 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:49:50 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:49:50 PM	Tube furnace set to 0
12/28/2010	2:50:50 PM	H2 valve closed
12/28/2010	2:50:50 PM	BCl3 valve closed
12/28/2010	2:50:50 PM	PH3 valve closed
12/28/2010	2:50:50 PM	SiCl4 pre valve closed
12/28/2010	2:50:50 PM	SiCl4 post valve closed
12/28/2010	2:50:50 PM	Bubbler valve closed
12/28/2010	2:50:50 PM	Helium valve opened
12/28/2010	2:50:50 PM	Main Vac valve opened
12/28/2010	2:50:50 PM	Bypass valve opened
12/28/2010	2:50:50 PM	Helium MFC set to  100.000000
12/28/2010	2:50:50 PM	H2 MFC set to  0.000000
12/28/2010	2:50:50 PM	BCl3 MFC set to  0.000000
12/28/2010	2:50:50 PM	PHl3 MFC set to  0.000000
12/28/2010	2:50:50 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:50:50 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:50:51 PM	Tube furnace set to 0
12/28/2010	2:51:51 PM	Helium valve closed
12/28/2010	2:51:51 PM	H2 valve closed
12/28/2010	2:51:51 PM	BCl3 valve closed
12/28/2010	2:51:51 PM	PH3 valve closed
12/28/2010	2:51:51 PM	SiCl4 pre valve closed
12/28/2010	2:51:51 PM	SiCl4 post valve closed
12/28/2010	2:51:51 PM	Bubbler valve closed
12/28/2010	2:51:51 PM	Main Vac valve opened
12/28/2010	2:51:51 PM	Bypass valve opened
12/28/2010	2:51:51 PM	Helium MFC set to  0.000000
12/28/2010	2:51:51 PM	H2 MFC set to  0.000000
12/28/2010	2:51:51 PM	BCl3 MFC set to  0.000000
12/28/2010	2:51:51 PM	PHl3 MFC set to  0.000000
12/28/2010	2:51:51 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:51:51 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:51:51 PM	Tube furnace set to 0
12/28/2010	2:52:51 PM	H2 valve closed
12/28/2010	2:52:51 PM	BCl3 valve closed
12/28/2010	2:52:51 PM	PH3 valve closed
12/28/2010	2:52:51 PM	SiCl4 pre valve closed
12/28/2010	2:52:51 PM	SiCl4 post valve closed
12/28/2010	2:52:51 PM	Bubbler valve closed
12/28/2010	2:52:51 PM	Helium valve opened
12/28/2010	2:52:51 PM	Main Vac valve opened
12/28/2010	2:52:51 PM	Bypass valve opened
12/28/2010	2:52:51 PM	Helium MFC set to  100.000000
12/28/2010	2:52:51 PM	H2 MFC set to  0.000000
12/28/2010	2:52:51 PM	BCl3 MFC set to  0.000000
12/28/2010	2:52:51 PM	PHl3 MFC set to  0.000000
12/28/2010	2:52:51 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:52:51 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:52:51 PM	Tube furnace set to 0
12/28/2010	2:53:51 PM	Helium valve closed
12/28/2010	2:53:51 PM	H2 valve closed
12/28/2010	2:53:51 PM	BCl3 valve closed
12/28/2010	2:53:51 PM	PH3 valve closed
12/28/2010	2:53:51 PM	SiCl4 pre valve closed
12/28/2010	2:53:51 PM	SiCl4 post valve closed
12/28/2010	2:53:51 PM	Bubbler valve closed
12/28/2010	2:53:51 PM	Main Vac valve opened
12/28/2010	2:53:51 PM	Bypass valve opened
12/28/2010	2:53:51 PM	Helium MFC set to  0.000000
12/28/2010	2:53:51 PM	H2 MFC set to  0.000000
12/28/2010	2:53:51 PM	BCl3 MFC set to  0.000000
12/28/2010	2:53:51 PM	PHl3 MFC set to  0.000000
12/28/2010	2:53:51 PM	SiCl4 MFC set to  0.000000
12/28/2010	2:53:51 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	2:53:51 PM	Tube furnace set to 0
12/28/2010	2:53:52 PM	Run finished at 2:53 PM
12/28/2010	2:53:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	3:06:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	3:06:58 PM	Recipe started at 3:06 PM
12/28/2010	3:06:58 PM	Helium valve closed
12/28/2010	3:06:58 PM	H2 valve closed
12/28/2010	3:06:58 PM	BCl3 valve closed
12/28/2010	3:06:58 PM	PH3 valve closed
12/28/2010	3:06:58 PM	SiCl4 pre valve closed
12/28/2010	3:06:58 PM	SiCl4 post valve closed
12/28/2010	3:06:58 PM	Main Vac valve closed
12/28/2010	3:06:58 PM	Bypass valve closed
12/28/2010	3:06:58 PM	Bubbler valve closed
12/28/2010	3:06:58 PM	Helium MFC set to  0.000000
12/28/2010	3:06:58 PM	H2 MFC set to  0.000000
12/28/2010	3:06:58 PM	BCl3 MFC set to  0.000000
12/28/2010	3:06:58 PM	PHl3 MFC set to  0.000000
12/28/2010	3:06:58 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:06:58 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:06:58 PM	Tube furnace set to 0
12/28/2010	3:06:59 PM	Run finished at 3:06 PM
12/28/2010	3:06:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	3:07:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	3:07:43 PM	Recipe started at 3:07 PM
12/28/2010	3:07:43 PM	Helium valve closed
12/28/2010	3:07:43 PM	H2 valve closed
12/28/2010	3:07:43 PM	BCl3 valve closed
12/28/2010	3:07:43 PM	PH3 valve closed
12/28/2010	3:07:43 PM	SiCl4 pre valve closed
12/28/2010	3:07:43 PM	SiCl4 post valve closed
12/28/2010	3:07:43 PM	Main Vac valve closed
12/28/2010	3:07:43 PM	Bubbler valve closed
12/28/2010	3:07:43 PM	Bypass valve opened
12/28/2010	3:07:43 PM	Helium MFC set to  0.000000
12/28/2010	3:07:43 PM	H2 MFC set to  0.000000
12/28/2010	3:07:43 PM	BCl3 MFC set to  0.000000
12/28/2010	3:07:43 PM	PHl3 MFC set to  0.000000
12/28/2010	3:07:43 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:07:43 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:07:43 PM	Tube furnace set to 0
12/28/2010	3:07:44 PM	Helium valve closed
12/28/2010	3:07:44 PM	H2 valve closed
12/28/2010	3:07:44 PM	BCl3 valve closed
12/28/2010	3:07:44 PM	PH3 valve closed
12/28/2010	3:07:44 PM	SiCl4 pre valve closed
12/28/2010	3:07:44 PM	SiCl4 post valve closed
12/28/2010	3:07:44 PM	Bubbler valve closed
12/28/2010	3:07:44 PM	Main Vac valve opened
12/28/2010	3:07:44 PM	Bypass valve opened
12/28/2010	3:07:44 PM	Helium MFC set to  0.000000
12/28/2010	3:07:44 PM	H2 MFC set to  0.000000
12/28/2010	3:07:44 PM	BCl3 MFC set to  0.000000
12/28/2010	3:07:44 PM	PHl3 MFC set to  0.000000
12/28/2010	3:07:44 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:07:44 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:07:44 PM	Tube furnace set to 0
12/28/2010	3:07:44 PM	Run finished at 3:07 PM
12/28/2010	3:07:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	3:08:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	3:08:17 PM	Recipe started at 3:08 PM
12/28/2010	3:08:17 PM	Helium valve closed
12/28/2010	3:08:17 PM	H2 valve closed
12/28/2010	3:08:17 PM	BCl3 valve closed
12/28/2010	3:08:17 PM	PH3 valve closed
12/28/2010	3:08:17 PM	SiCl4 pre valve closed
12/28/2010	3:08:17 PM	SiCl4 post valve closed
12/28/2010	3:08:18 PM	Main Vac valve closed
12/28/2010	3:08:18 PM	Bubbler valve closed
12/28/2010	3:08:18 PM	Bypass valve opened
12/28/2010	3:08:18 PM	Helium MFC set to  0.000000
12/28/2010	3:08:18 PM	H2 MFC set to  0.000000
12/28/2010	3:08:18 PM	BCl3 MFC set to  0.000000
12/28/2010	3:08:18 PM	PHl3 MFC set to  0.000000
12/28/2010	3:08:18 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:08:18 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:08:18 PM	Tube furnace set to 0
12/28/2010	3:08:18 PM	Helium valve closed
12/28/2010	3:08:18 PM	H2 valve closed
12/28/2010	3:08:18 PM	BCl3 valve closed
12/28/2010	3:08:18 PM	PH3 valve closed
12/28/2010	3:08:18 PM	SiCl4 pre valve closed
12/28/2010	3:08:18 PM	SiCl4 post valve closed
12/28/2010	3:08:18 PM	Bubbler valve closed
12/28/2010	3:08:18 PM	Main Vac valve opened
12/28/2010	3:08:18 PM	Bypass valve opened
12/28/2010	3:08:18 PM	Helium MFC set to  0.000000
12/28/2010	3:08:18 PM	H2 MFC set to  0.000000
12/28/2010	3:08:18 PM	BCl3 MFC set to  0.000000
12/28/2010	3:08:18 PM	PHl3 MFC set to  0.000000
12/28/2010	3:08:18 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:08:18 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:08:18 PM	Tube furnace set to 0
12/28/2010	3:09:18 PM	H2 valve closed
12/28/2010	3:09:18 PM	BCl3 valve closed
12/28/2010	3:09:18 PM	PH3 valve closed
12/28/2010	3:09:18 PM	SiCl4 pre valve closed
12/28/2010	3:09:18 PM	SiCl4 post valve closed
12/28/2010	3:09:18 PM	Bubbler valve closed
12/28/2010	3:09:18 PM	Helium valve opened
12/28/2010	3:09:18 PM	Main Vac valve opened
12/28/2010	3:09:18 PM	Bypass valve opened
12/28/2010	3:09:18 PM	Helium MFC set to  100.000000
12/28/2010	3:09:18 PM	H2 MFC set to  0.000000
12/28/2010	3:09:18 PM	BCl3 MFC set to  0.000000
12/28/2010	3:09:18 PM	PHl3 MFC set to  0.000000
12/28/2010	3:09:18 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:09:18 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:09:18 PM	Tube furnace set to 0
12/28/2010	3:10:18 PM	Helium valve closed
12/28/2010	3:10:18 PM	H2 valve closed
12/28/2010	3:10:18 PM	BCl3 valve closed
12/28/2010	3:10:18 PM	PH3 valve closed
12/28/2010	3:10:18 PM	SiCl4 pre valve closed
12/28/2010	3:10:18 PM	SiCl4 post valve closed
12/28/2010	3:10:18 PM	Bubbler valve closed
12/28/2010	3:10:18 PM	Main Vac valve opened
12/28/2010	3:10:18 PM	Bypass valve opened
12/28/2010	3:10:18 PM	Helium MFC set to  0.000000
12/28/2010	3:10:18 PM	H2 MFC set to  0.000000
12/28/2010	3:10:18 PM	BCl3 MFC set to  0.000000
12/28/2010	3:10:18 PM	PHl3 MFC set to  0.000000
12/28/2010	3:10:18 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:10:18 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:10:19 PM	Tube furnace set to 0
12/28/2010	3:11:19 PM	H2 valve closed
12/28/2010	3:11:19 PM	BCl3 valve closed
12/28/2010	3:11:19 PM	PH3 valve closed
12/28/2010	3:11:19 PM	SiCl4 pre valve closed
12/28/2010	3:11:19 PM	SiCl4 post valve closed
12/28/2010	3:11:19 PM	Bubbler valve closed
12/28/2010	3:11:19 PM	Helium valve opened
12/28/2010	3:11:19 PM	Main Vac valve opened
12/28/2010	3:11:19 PM	Bypass valve opened
12/28/2010	3:11:19 PM	Helium MFC set to  100.000000
12/28/2010	3:11:19 PM	H2 MFC set to  0.000000
12/28/2010	3:11:19 PM	BCl3 MFC set to  0.000000
12/28/2010	3:11:19 PM	PHl3 MFC set to  0.000000
12/28/2010	3:11:19 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:11:19 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:11:19 PM	Tube furnace set to 0
12/28/2010	3:12:19 PM	Helium valve closed
12/28/2010	3:12:19 PM	H2 valve closed
12/28/2010	3:12:19 PM	BCl3 valve closed
12/28/2010	3:12:19 PM	PH3 valve closed
12/28/2010	3:12:19 PM	SiCl4 pre valve closed
12/28/2010	3:12:19 PM	SiCl4 post valve closed
12/28/2010	3:12:19 PM	Bubbler valve closed
12/28/2010	3:12:19 PM	Main Vac valve opened
12/28/2010	3:12:19 PM	Bypass valve opened
12/28/2010	3:12:19 PM	Helium MFC set to  0.000000
12/28/2010	3:12:19 PM	H2 MFC set to  0.000000
12/28/2010	3:12:19 PM	BCl3 MFC set to  0.000000
12/28/2010	3:12:19 PM	PHl3 MFC set to  0.000000
12/28/2010	3:12:19 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:12:19 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:12:19 PM	Tube furnace set to 0
12/28/2010	3:13:19 PM	H2 valve closed
12/28/2010	3:13:19 PM	BCl3 valve closed
12/28/2010	3:13:19 PM	PH3 valve closed
12/28/2010	3:13:19 PM	SiCl4 pre valve closed
12/28/2010	3:13:19 PM	SiCl4 post valve closed
12/28/2010	3:13:19 PM	Bubbler valve closed
12/28/2010	3:13:19 PM	Helium valve opened
12/28/2010	3:13:19 PM	Main Vac valve opened
12/28/2010	3:13:19 PM	Bypass valve opened
12/28/2010	3:13:19 PM	Helium MFC set to  100.000000
12/28/2010	3:13:19 PM	H2 MFC set to  0.000000
12/28/2010	3:13:19 PM	BCl3 MFC set to  0.000000
12/28/2010	3:13:19 PM	PHl3 MFC set to  0.000000
12/28/2010	3:13:19 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:13:19 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:13:19 PM	Tube furnace set to 0
12/28/2010	3:14:19 PM	Helium valve closed
12/28/2010	3:14:19 PM	H2 valve closed
12/28/2010	3:14:19 PM	BCl3 valve closed
12/28/2010	3:14:19 PM	PH3 valve closed
12/28/2010	3:14:19 PM	SiCl4 pre valve closed
12/28/2010	3:14:19 PM	SiCl4 post valve closed
12/28/2010	3:14:19 PM	Bubbler valve closed
12/28/2010	3:14:19 PM	Main Vac valve opened
12/28/2010	3:14:19 PM	Bypass valve opened
12/28/2010	3:14:19 PM	Helium MFC set to  0.000000
12/28/2010	3:14:19 PM	H2 MFC set to  0.000000
12/28/2010	3:14:19 PM	BCl3 MFC set to  0.000000
12/28/2010	3:14:19 PM	PHl3 MFC set to  0.000000
12/28/2010	3:14:19 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:14:19 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:14:19 PM	Tube furnace set to 0
12/28/2010	3:15:19 PM	H2 valve closed
12/28/2010	3:15:19 PM	BCl3 valve closed
12/28/2010	3:15:19 PM	PH3 valve closed
12/28/2010	3:15:19 PM	SiCl4 pre valve closed
12/28/2010	3:15:19 PM	SiCl4 post valve closed
12/28/2010	3:15:19 PM	Bubbler valve closed
12/28/2010	3:15:19 PM	Helium valve opened
12/28/2010	3:15:19 PM	Main Vac valve opened
12/28/2010	3:15:19 PM	Bypass valve opened
12/28/2010	3:15:19 PM	Helium MFC set to  100.000000
12/28/2010	3:15:19 PM	H2 MFC set to  0.000000
12/28/2010	3:15:19 PM	BCl3 MFC set to  0.000000
12/28/2010	3:15:19 PM	PHl3 MFC set to  0.000000
12/28/2010	3:15:19 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:15:19 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:15:20 PM	Tube furnace set to 0
12/28/2010	3:16:20 PM	Helium valve closed
12/28/2010	3:16:20 PM	H2 valve closed
12/28/2010	3:16:20 PM	BCl3 valve closed
12/28/2010	3:16:20 PM	PH3 valve closed
12/28/2010	3:16:20 PM	SiCl4 pre valve closed
12/28/2010	3:16:20 PM	SiCl4 post valve closed
12/28/2010	3:16:20 PM	Bubbler valve closed
12/28/2010	3:16:20 PM	Main Vac valve opened
12/28/2010	3:16:20 PM	Bypass valve opened
12/28/2010	3:16:20 PM	Helium MFC set to  0.000000
12/28/2010	3:16:20 PM	H2 MFC set to  0.000000
12/28/2010	3:16:20 PM	BCl3 MFC set to  0.000000
12/28/2010	3:16:20 PM	PHl3 MFC set to  0.000000
12/28/2010	3:16:20 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:16:20 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:16:20 PM	Tube furnace set to 0
12/28/2010	3:17:20 PM	H2 valve closed
12/28/2010	3:17:20 PM	BCl3 valve closed
12/28/2010	3:17:20 PM	PH3 valve closed
12/28/2010	3:17:20 PM	SiCl4 pre valve closed
12/28/2010	3:17:20 PM	SiCl4 post valve closed
12/28/2010	3:17:20 PM	Bubbler valve closed
12/28/2010	3:17:20 PM	Helium valve opened
12/28/2010	3:17:20 PM	Main Vac valve opened
12/28/2010	3:17:20 PM	Bypass valve opened
12/28/2010	3:17:20 PM	Helium MFC set to  100.000000
12/28/2010	3:17:20 PM	H2 MFC set to  0.000000
12/28/2010	3:17:20 PM	BCl3 MFC set to  0.000000
12/28/2010	3:17:20 PM	PHl3 MFC set to  0.000000
12/28/2010	3:17:20 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:17:20 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:17:20 PM	Tube furnace set to 0
12/28/2010	3:18:20 PM	Helium valve closed
12/28/2010	3:18:20 PM	H2 valve closed
12/28/2010	3:18:20 PM	BCl3 valve closed
12/28/2010	3:18:20 PM	PH3 valve closed
12/28/2010	3:18:20 PM	SiCl4 pre valve closed
12/28/2010	3:18:20 PM	SiCl4 post valve closed
12/28/2010	3:18:20 PM	Bubbler valve closed
12/28/2010	3:18:20 PM	Main Vac valve opened
12/28/2010	3:18:20 PM	Bypass valve opened
12/28/2010	3:18:20 PM	Helium MFC set to  0.000000
12/28/2010	3:18:20 PM	H2 MFC set to  0.000000
12/28/2010	3:18:20 PM	BCl3 MFC set to  0.000000
12/28/2010	3:18:20 PM	PHl3 MFC set to  0.000000
12/28/2010	3:18:20 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:18:20 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:18:20 PM	Tube furnace set to 0
12/28/2010	3:19:20 PM	H2 valve closed
12/28/2010	3:19:20 PM	BCl3 valve closed
12/28/2010	3:19:20 PM	PH3 valve closed
12/28/2010	3:19:20 PM	SiCl4 pre valve closed
12/28/2010	3:19:20 PM	SiCl4 post valve closed
12/28/2010	3:19:20 PM	Bubbler valve closed
12/28/2010	3:19:20 PM	Helium valve opened
12/28/2010	3:19:20 PM	Main Vac valve opened
12/28/2010	3:19:20 PM	Bypass valve opened
12/28/2010	3:19:20 PM	Helium MFC set to  100.000000
12/28/2010	3:19:20 PM	H2 MFC set to  0.000000
12/28/2010	3:19:20 PM	BCl3 MFC set to  0.000000
12/28/2010	3:19:20 PM	PHl3 MFC set to  0.000000
12/28/2010	3:19:20 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:19:20 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:19:20 PM	Tube furnace set to 0
12/28/2010	3:20:20 PM	Helium valve closed
12/28/2010	3:20:20 PM	H2 valve closed
12/28/2010	3:20:20 PM	BCl3 valve closed
12/28/2010	3:20:20 PM	PH3 valve closed
12/28/2010	3:20:20 PM	SiCl4 pre valve closed
12/28/2010	3:20:20 PM	SiCl4 post valve closed
12/28/2010	3:20:20 PM	Bubbler valve closed
12/28/2010	3:20:20 PM	Main Vac valve opened
12/28/2010	3:20:20 PM	Bypass valve opened
12/28/2010	3:20:20 PM	Helium MFC set to  0.000000
12/28/2010	3:20:20 PM	H2 MFC set to  0.000000
12/28/2010	3:20:20 PM	BCl3 MFC set to  0.000000
12/28/2010	3:20:20 PM	PHl3 MFC set to  0.000000
12/28/2010	3:20:20 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:20:20 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:20:21 PM	Tube furnace set to 0
12/28/2010	3:21:21 PM	H2 valve closed
12/28/2010	3:21:21 PM	BCl3 valve closed
12/28/2010	3:21:21 PM	PH3 valve closed
12/28/2010	3:21:21 PM	SiCl4 pre valve closed
12/28/2010	3:21:21 PM	SiCl4 post valve closed
12/28/2010	3:21:21 PM	Bubbler valve closed
12/28/2010	3:21:21 PM	Helium valve opened
12/28/2010	3:21:21 PM	Main Vac valve opened
12/28/2010	3:21:21 PM	Bypass valve opened
12/28/2010	3:21:21 PM	Helium MFC set to  100.000000
12/28/2010	3:21:21 PM	H2 MFC set to  0.000000
12/28/2010	3:21:21 PM	BCl3 MFC set to  0.000000
12/28/2010	3:21:21 PM	PHl3 MFC set to  0.000000
12/28/2010	3:21:21 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:21:21 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:21:21 PM	Tube furnace set to 0
12/28/2010	3:22:21 PM	Helium valve closed
12/28/2010	3:22:21 PM	H2 valve closed
12/28/2010	3:22:21 PM	BCl3 valve closed
12/28/2010	3:22:21 PM	PH3 valve closed
12/28/2010	3:22:21 PM	SiCl4 pre valve closed
12/28/2010	3:22:21 PM	SiCl4 post valve closed
12/28/2010	3:22:21 PM	Bubbler valve closed
12/28/2010	3:22:21 PM	Main Vac valve opened
12/28/2010	3:22:21 PM	Bypass valve opened
12/28/2010	3:22:21 PM	Helium MFC set to  0.000000
12/28/2010	3:22:21 PM	H2 MFC set to  0.000000
12/28/2010	3:22:21 PM	BCl3 MFC set to  0.000000
12/28/2010	3:22:21 PM	PHl3 MFC set to  0.000000
12/28/2010	3:22:21 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:22:21 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:22:21 PM	Tube furnace set to 0
12/28/2010	3:23:21 PM	H2 valve closed
12/28/2010	3:23:21 PM	BCl3 valve closed
12/28/2010	3:23:21 PM	PH3 valve closed
12/28/2010	3:23:21 PM	SiCl4 pre valve closed
12/28/2010	3:23:21 PM	SiCl4 post valve closed
12/28/2010	3:23:21 PM	Bubbler valve closed
12/28/2010	3:23:21 PM	Helium valve opened
12/28/2010	3:23:21 PM	Main Vac valve opened
12/28/2010	3:23:21 PM	Bypass valve opened
12/28/2010	3:23:21 PM	Helium MFC set to  100.000000
12/28/2010	3:23:21 PM	H2 MFC set to  0.000000
12/28/2010	3:23:21 PM	BCl3 MFC set to  0.000000
12/28/2010	3:23:21 PM	PHl3 MFC set to  0.000000
12/28/2010	3:23:21 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:23:21 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:23:21 PM	Tube furnace set to 0
12/28/2010	3:24:21 PM	Helium valve closed
12/28/2010	3:24:21 PM	H2 valve closed
12/28/2010	3:24:21 PM	BCl3 valve closed
12/28/2010	3:24:21 PM	PH3 valve closed
12/28/2010	3:24:21 PM	SiCl4 pre valve closed
12/28/2010	3:24:21 PM	SiCl4 post valve closed
12/28/2010	3:24:21 PM	Bubbler valve closed
12/28/2010	3:24:21 PM	Main Vac valve opened
12/28/2010	3:24:21 PM	Bypass valve opened
12/28/2010	3:24:21 PM	Helium MFC set to  0.000000
12/28/2010	3:24:21 PM	H2 MFC set to  0.000000
12/28/2010	3:24:21 PM	BCl3 MFC set to  0.000000
12/28/2010	3:24:21 PM	PHl3 MFC set to  0.000000
12/28/2010	3:24:21 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:24:21 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:24:21 PM	Tube furnace set to 0
12/28/2010	3:25:21 PM	H2 valve closed
12/28/2010	3:25:21 PM	BCl3 valve closed
12/28/2010	3:25:21 PM	PH3 valve closed
12/28/2010	3:25:21 PM	SiCl4 pre valve closed
12/28/2010	3:25:21 PM	SiCl4 post valve closed
12/28/2010	3:25:21 PM	Bubbler valve closed
12/28/2010	3:25:21 PM	Helium valve opened
12/28/2010	3:25:21 PM	Main Vac valve opened
12/28/2010	3:25:21 PM	Bypass valve opened
12/28/2010	3:25:21 PM	Helium MFC set to  100.000000
12/28/2010	3:25:21 PM	H2 MFC set to  0.000000
12/28/2010	3:25:21 PM	BCl3 MFC set to  0.000000
12/28/2010	3:25:21 PM	PHl3 MFC set to  0.000000
12/28/2010	3:25:21 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:25:21 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:25:22 PM	Tube furnace set to 0
12/28/2010	3:26:22 PM	Helium valve closed
12/28/2010	3:26:22 PM	H2 valve closed
12/28/2010	3:26:22 PM	BCl3 valve closed
12/28/2010	3:26:22 PM	PH3 valve closed
12/28/2010	3:26:22 PM	SiCl4 pre valve closed
12/28/2010	3:26:22 PM	SiCl4 post valve closed
12/28/2010	3:26:22 PM	Bubbler valve closed
12/28/2010	3:26:22 PM	Main Vac valve opened
12/28/2010	3:26:22 PM	Bypass valve opened
12/28/2010	3:26:22 PM	Helium MFC set to  0.000000
12/28/2010	3:26:22 PM	H2 MFC set to  0.000000
12/28/2010	3:26:22 PM	BCl3 MFC set to  0.000000
12/28/2010	3:26:22 PM	PHl3 MFC set to  0.000000
12/28/2010	3:26:22 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:26:22 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:26:22 PM	Tube furnace set to 0
12/28/2010	3:27:22 PM	H2 valve closed
12/28/2010	3:27:22 PM	BCl3 valve closed
12/28/2010	3:27:22 PM	PH3 valve closed
12/28/2010	3:27:22 PM	SiCl4 pre valve closed
12/28/2010	3:27:22 PM	SiCl4 post valve closed
12/28/2010	3:27:22 PM	Bubbler valve closed
12/28/2010	3:27:22 PM	Helium valve opened
12/28/2010	3:27:22 PM	Main Vac valve opened
12/28/2010	3:27:22 PM	Bypass valve opened
12/28/2010	3:27:22 PM	Helium MFC set to  100.000000
12/28/2010	3:27:22 PM	H2 MFC set to  0.000000
12/28/2010	3:27:22 PM	BCl3 MFC set to  0.000000
12/28/2010	3:27:22 PM	PHl3 MFC set to  0.000000
12/28/2010	3:27:22 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:27:22 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:27:22 PM	Tube furnace set to 0
12/28/2010	3:28:22 PM	Helium valve closed
12/28/2010	3:28:22 PM	H2 valve closed
12/28/2010	3:28:22 PM	BCl3 valve closed
12/28/2010	3:28:22 PM	PH3 valve closed
12/28/2010	3:28:22 PM	SiCl4 pre valve closed
12/28/2010	3:28:22 PM	SiCl4 post valve closed
12/28/2010	3:28:22 PM	Bubbler valve closed
12/28/2010	3:28:22 PM	Main Vac valve opened
12/28/2010	3:28:22 PM	Bypass valve opened
12/28/2010	3:28:22 PM	Helium MFC set to  0.000000
12/28/2010	3:28:22 PM	H2 MFC set to  0.000000
12/28/2010	3:28:22 PM	BCl3 MFC set to  0.000000
12/28/2010	3:28:22 PM	PHl3 MFC set to  0.000000
12/28/2010	3:28:22 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:28:22 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:28:22 PM	Tube furnace set to 0
12/28/2010	3:28:23 PM	Run finished at 3:28 PM
12/28/2010	3:28:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	3:40:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	3:40:48 PM	Recipe started at 3:40 PM
12/28/2010	3:40:48 PM	Helium valve closed
12/28/2010	3:40:48 PM	H2 valve closed
12/28/2010	3:40:48 PM	BCl3 valve closed
12/28/2010	3:40:48 PM	PH3 valve closed
12/28/2010	3:40:48 PM	SiCl4 pre valve closed
12/28/2010	3:40:48 PM	SiCl4 post valve closed
12/28/2010	3:40:48 PM	Main Vac valve closed
12/28/2010	3:40:48 PM	Bypass valve closed
12/28/2010	3:40:48 PM	Bubbler valve closed
12/28/2010	3:40:48 PM	Helium MFC set to  0.000000
12/28/2010	3:40:48 PM	H2 MFC set to  0.000000
12/28/2010	3:40:48 PM	BCl3 MFC set to  0.000000
12/28/2010	3:40:48 PM	PHl3 MFC set to  0.000000
12/28/2010	3:40:48 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:40:48 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:40:48 PM	Tube furnace set to 0
12/28/2010	3:40:48 PM	Run finished at 3:40 PM
12/28/2010	3:40:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	3:41:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	3:41:17 PM	Recipe started at 3:41 PM
12/28/2010	3:41:17 PM	Helium valve closed
12/28/2010	3:41:17 PM	H2 valve closed
12/28/2010	3:41:17 PM	BCl3 valve closed
12/28/2010	3:41:17 PM	PH3 valve closed
12/28/2010	3:41:17 PM	SiCl4 pre valve closed
12/28/2010	3:41:17 PM	SiCl4 post valve closed
12/28/2010	3:41:17 PM	Main Vac valve closed
12/28/2010	3:41:17 PM	Bubbler valve closed
12/28/2010	3:41:17 PM	Bypass valve opened
12/28/2010	3:41:17 PM	Helium MFC set to  0.000000
12/28/2010	3:41:17 PM	H2 MFC set to  0.000000
12/28/2010	3:41:17 PM	BCl3 MFC set to  0.000000
12/28/2010	3:41:17 PM	PHl3 MFC set to  0.000000
12/28/2010	3:41:17 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:41:17 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:41:18 PM	Tube furnace set to 0
12/28/2010	3:41:18 PM	Helium valve closed
12/28/2010	3:41:18 PM	H2 valve closed
12/28/2010	3:41:18 PM	BCl3 valve closed
12/28/2010	3:41:18 PM	PH3 valve closed
12/28/2010	3:41:18 PM	SiCl4 pre valve closed
12/28/2010	3:41:18 PM	SiCl4 post valve closed
12/28/2010	3:41:18 PM	Bubbler valve closed
12/28/2010	3:41:18 PM	Main Vac valve opened
12/28/2010	3:41:18 PM	Bypass valve opened
12/28/2010	3:41:18 PM	Helium MFC set to  0.000000
12/28/2010	3:41:18 PM	H2 MFC set to  0.000000
12/28/2010	3:41:18 PM	BCl3 MFC set to  0.000000
12/28/2010	3:41:18 PM	PHl3 MFC set to  0.000000
12/28/2010	3:41:18 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:41:18 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:41:18 PM	Tube furnace set to 0
12/28/2010	3:41:18 PM	Run finished at 3:41 PM
12/28/2010	3:41:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	3:44:13 PM	Recipe started at 3:44 PM
12/28/2010	3:44:13 PM	Helium valve closed
12/28/2010	3:44:13 PM	BCl3 valve closed
12/28/2010	3:44:13 PM	PH3 valve closed
12/28/2010	3:44:13 PM	SiCl4 pre valve closed
12/28/2010	3:44:13 PM	SiCl4 post valve closed
12/28/2010	3:44:13 PM	Main Vac valve closed
12/28/2010	3:44:13 PM	Bypass valve closed
12/28/2010	3:44:13 PM	Bubbler valve closed
12/28/2010	3:44:13 PM	H2 valve opened
12/28/2010	3:44:13 PM	Helium MFC set to  0.000000
12/28/2010	3:44:13 PM	H2 MFC set to  500.000000
12/28/2010	3:44:13 PM	BCl3 MFC set to  0.000000
12/28/2010	3:44:13 PM	PHl3 MFC set to  0.000000
12/28/2010	3:44:13 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:44:13 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:44:13 PM	Tube furnace set to 100
12/28/2010	3:45:27 PM	Helium valve closed
12/28/2010	3:45:27 PM	BCl3 valve closed
12/28/2010	3:45:27 PM	PH3 valve closed
12/28/2010	3:45:27 PM	SiCl4 pre valve closed
12/28/2010	3:45:27 PM	SiCl4 post valve closed
12/28/2010	3:45:27 PM	Main Vac valve closed
12/28/2010	3:45:27 PM	Bypass valve closed
12/28/2010	3:45:27 PM	H2 valve opened
12/28/2010	3:45:27 PM	Bubbler valve opened
12/28/2010	3:45:27 PM	Helium MFC set to  0.000000
12/28/2010	3:45:27 PM	H2 MFC set to  500.000000
12/28/2010	3:45:27 PM	BCl3 MFC set to  0.000000
12/28/2010	3:45:27 PM	PHl3 MFC set to  0.000000
12/28/2010	3:45:27 PM	SiCl4 MFC set to  0.000000
12/28/2010	3:45:27 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	3:45:27 PM	Tube furnace set to 1000
12/28/2010	4:05:27 PM	Helium valve closed
12/28/2010	4:05:27 PM	PH3 valve closed
12/28/2010	4:05:27 PM	Main Vac valve closed
12/28/2010	4:05:27 PM	Bypass valve closed
12/28/2010	4:05:27 PM	H2 valve opened
12/28/2010	4:05:27 PM	BCl3 valve opened
12/28/2010	4:05:27 PM	SiCl4 pre valve opened
12/28/2010	4:05:27 PM	SiCl4 post valve opened
12/28/2010	4:05:27 PM	Bubbler valve opened
12/28/2010	4:05:27 PM	Helium MFC set to  0.000000
12/28/2010	4:05:27 PM	H2 MFC set to  500.000000
12/28/2010	4:05:27 PM	BCl3 MFC set to  3.000000
12/28/2010	4:05:27 PM	PHl3 MFC set to  0.000000
12/28/2010	4:05:27 PM	SiCl4 MFC set to  50.000000
12/28/2010	4:05:27 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	4:05:27 PM	Tube furnace set to 1000
12/28/2010	4:25:27 PM	H2 valve closed
12/28/2010	4:25:27 PM	BCl3 valve closed
12/28/2010	4:25:27 PM	PH3 valve closed
12/28/2010	4:25:27 PM	SiCl4 pre valve closed
12/28/2010	4:25:27 PM	SiCl4 post valve closed
12/28/2010	4:25:27 PM	Main Vac valve closed
12/28/2010	4:25:27 PM	Bypass valve closed
12/28/2010	4:25:27 PM	Helium valve opened
12/28/2010	4:25:27 PM	Bubbler valve opened
12/28/2010	4:25:27 PM	Helium MFC set to  500.000000
12/28/2010	4:25:27 PM	H2 MFC set to  0.000000
12/28/2010	4:25:27 PM	BCl3 MFC set to  0.000000
12/28/2010	4:25:27 PM	PHl3 MFC set to  0.000000
12/28/2010	4:25:27 PM	SiCl4 MFC set to  0.000000
12/28/2010	4:25:27 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	4:25:27 PM	Tube furnace set to 0
12/28/2010	4:45:27 PM	Helium valve closed
12/28/2010	4:45:27 PM	H2 valve closed
12/28/2010	4:45:27 PM	BCl3 valve closed
12/28/2010	4:45:27 PM	PH3 valve closed
12/28/2010	4:45:27 PM	SiCl4 pre valve closed
12/28/2010	4:45:28 PM	SiCl4 post valve closed
12/28/2010	4:45:28 PM	Main Vac valve closed
12/28/2010	4:45:28 PM	Bypass valve closed
12/28/2010	4:45:28 PM	Bubbler valve closed
12/28/2010	4:45:28 PM	Helium MFC set to  0.000000
12/28/2010	4:45:28 PM	H2 MFC set to  0.000000
12/28/2010	4:45:28 PM	BCl3 MFC set to  0.000000
12/28/2010	4:45:28 PM	PHl3 MFC set to  0.000000
12/28/2010	4:45:28 PM	SiCl4 MFC set to  0.000000
12/28/2010	4:45:28 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	4:45:28 PM	Tube furnace set to 0
12/28/2010	4:45:28 PM	Run finished at 4:45 PM
12/28/2010	5:03:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	5:03:23 PM	Recipe started at 5:03 PM
12/28/2010	5:03:23 PM	H2 valve closed
12/28/2010	5:03:23 PM	BCl3 valve closed
12/28/2010	5:03:23 PM	PH3 valve closed
12/28/2010	5:03:23 PM	SiCl4 pre valve closed
12/28/2010	5:03:23 PM	SiCl4 post valve closed
12/28/2010	5:03:23 PM	Main Vac valve closed
12/28/2010	5:03:23 PM	Bypass valve closed
12/28/2010	5:03:23 PM	Bubbler valve closed
12/28/2010	5:03:23 PM	Helium valve opened
12/28/2010	5:03:23 PM	Helium MFC set to  500.000000
12/28/2010	5:03:23 PM	H2 MFC set to  0.000000
12/28/2010	5:03:23 PM	BCl3 MFC set to  0.000000
12/28/2010	5:03:23 PM	PHl3 MFC set to  0.000000
12/28/2010	5:03:23 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:03:23 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	5:03:24 PM	Tube furnace set to 0
12/28/2010	5:03:31 PM	Helium valve closed
12/28/2010	5:03:31 PM	H2 valve closed
12/28/2010	5:03:31 PM	BCl3 valve closed
12/28/2010	5:03:31 PM	PH3 valve closed
12/28/2010	5:03:31 PM	SiCl4 pre valve closed
12/28/2010	5:03:31 PM	SiCl4 post valve closed
12/28/2010	5:03:31 PM	Main Vac valve closed
12/28/2010	5:03:31 PM	Bypass valve closed
12/28/2010	5:03:31 PM	Bubbler valve closed
12/28/2010	5:03:31 PM	Helium MFC set to  0.000000
12/28/2010	5:03:31 PM	H2 MFC set to  0.000000
12/28/2010	5:03:31 PM	BCl3 MFC set to  0.000000
12/28/2010	5:03:31 PM	PHl3 MFC set to  0.000000
12/28/2010	5:03:31 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:03:31 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	5:03:31 PM	Tube furnace set to 0
12/28/2010	5:03:31 PM	Run finished at 5:03 PM
12/28/2010	5:03:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	5:10:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	5:10:21 PM	Recipe started at 5:10 PM
12/28/2010	5:10:21 PM	Helium valve closed
12/28/2010	5:10:21 PM	H2 valve closed
12/28/2010	5:10:21 PM	BCl3 valve closed
12/28/2010	5:10:21 PM	PH3 valve closed
12/28/2010	5:10:21 PM	SiCl4 pre valve closed
12/28/2010	5:10:21 PM	SiCl4 post valve closed
12/28/2010	5:10:21 PM	Main Vac valve closed
12/28/2010	5:10:21 PM	Bubbler valve closed
12/28/2010	5:10:21 PM	Bypass valve opened
12/28/2010	5:10:21 PM	Helium MFC set to  0.000000
12/28/2010	5:10:21 PM	H2 MFC set to  0.000000
12/28/2010	5:10:21 PM	BCl3 MFC set to  0.000000
12/28/2010	5:10:21 PM	PHl3 MFC set to  0.000000
12/28/2010	5:10:21 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:10:21 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	5:10:21 PM	Tube furnace set to 0
12/28/2010	5:15:33 PM	Helium valve closed
12/28/2010	5:15:33 PM	H2 valve closed
12/28/2010	5:15:33 PM	BCl3 valve closed
12/28/2010	5:15:33 PM	PH3 valve closed
12/28/2010	5:15:33 PM	SiCl4 pre valve closed
12/28/2010	5:15:33 PM	SiCl4 post valve closed
12/28/2010	5:15:33 PM	Bubbler valve closed
12/28/2010	5:15:33 PM	Main Vac valve opened
12/28/2010	5:15:33 PM	Bypass valve opened
12/28/2010	5:15:33 PM	Helium MFC set to  0.000000
12/28/2010	5:15:33 PM	H2 MFC set to  0.000000
12/28/2010	5:15:33 PM	BCl3 MFC set to  0.000000
12/28/2010	5:15:33 PM	PHl3 MFC set to  0.000000
12/28/2010	5:15:33 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:15:33 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	5:15:33 PM	Tube furnace set to 0
12/28/2010	5:15:33 PM	Run finished at 5:15 PM
12/28/2010	5:15:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	5:16:09 PM	Tube furnace set to 50
12/28/2010	5:16:20 PM	Tube furnace set to 0
12/28/2010	5:16:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	5:16:36 PM	Recipe started at 5:16 PM
12/28/2010	5:16:36 PM	Helium valve closed
12/28/2010	5:16:36 PM	H2 valve closed
12/28/2010	5:16:36 PM	BCl3 valve closed
12/28/2010	5:16:36 PM	PH3 valve closed
12/28/2010	5:16:36 PM	SiCl4 pre valve closed
12/28/2010	5:16:36 PM	SiCl4 post valve closed
12/28/2010	5:16:36 PM	Main Vac valve closed
12/28/2010	5:16:36 PM	Bubbler valve closed
12/28/2010	5:16:36 PM	Bypass valve opened
12/28/2010	5:16:36 PM	Helium MFC set to  0.000000
12/28/2010	5:16:36 PM	H2 MFC set to  0.000000
12/28/2010	5:16:36 PM	BCl3 MFC set to  0.000000
12/28/2010	5:16:36 PM	PHl3 MFC set to  0.000000
12/28/2010	5:16:36 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:16:36 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	5:16:36 PM	Tube furnace set to 0
12/28/2010	5:16:37 PM	Helium valve closed
12/28/2010	5:16:37 PM	H2 valve closed
12/28/2010	5:16:37 PM	BCl3 valve closed
12/28/2010	5:16:37 PM	PH3 valve closed
12/28/2010	5:16:37 PM	SiCl4 pre valve closed
12/28/2010	5:16:37 PM	SiCl4 post valve closed
12/28/2010	5:16:37 PM	Bubbler valve closed
12/28/2010	5:16:37 PM	Main Vac valve opened
12/28/2010	5:16:37 PM	Bypass valve opened
12/28/2010	5:16:37 PM	Helium MFC set to  0.000000
12/28/2010	5:16:37 PM	H2 MFC set to  0.000000
12/28/2010	5:16:37 PM	BCl3 MFC set to  0.000000
12/28/2010	5:16:37 PM	PHl3 MFC set to  0.000000
12/28/2010	5:16:37 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:16:37 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	5:16:37 PM	Tube furnace set to 0
12/28/2010	5:17:29 PM	Run aborted at 5:17 PM
12/28/2010	5:17:29 PM	Helium valve closed
12/28/2010	5:17:29 PM	H2 valve closed
12/28/2010	5:17:29 PM	BCl3 valve closed
12/28/2010	5:17:29 PM	PH3 valve closed
12/28/2010	5:17:29 PM	SiCl4 pre valve closed
12/28/2010	5:17:29 PM	SiCl4 post valve closed
12/28/2010	5:17:29 PM	Bypass valve closed
12/28/2010	5:17:29 PM	Main Vac valve closed
12/28/2010	5:17:29 PM	Bubbler valve closed
12/28/2010	5:17:29 PM	Helium MFC set to  0.000000
12/28/2010	5:17:29 PM	H2 MFC set to  0.000000
12/28/2010	5:17:29 PM	BCl3 MFC set to  0.000000
12/28/2010	5:17:29 PM	PHl3 MFC set to  0.000000
12/28/2010	5:17:29 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:17:29 PM	Tube furnace set to 0
12/28/2010	5:17:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	5:18:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	5:18:54 PM	Recipe started at 5:18 PM
12/28/2010	5:18:54 PM	H2 valve closed
12/28/2010	5:18:54 PM	BCl3 valve closed
12/28/2010	5:18:54 PM	PH3 valve closed
12/28/2010	5:18:54 PM	SiCl4 pre valve closed
12/28/2010	5:18:54 PM	SiCl4 post valve closed
12/28/2010	5:18:54 PM	Main Vac valve closed
12/28/2010	5:18:54 PM	Bypass valve closed
12/28/2010	5:18:54 PM	Bubbler valve closed
12/28/2010	5:18:54 PM	Helium valve opened
12/28/2010	5:18:54 PM	Helium MFC set to  500.000000
12/28/2010	5:18:54 PM	H2 MFC set to  0.000000
12/28/2010	5:18:54 PM	BCl3 MFC set to  0.000000
12/28/2010	5:18:54 PM	PHl3 MFC set to  0.000000
12/28/2010	5:18:54 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:18:54 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	5:18:54 PM	Tube furnace set to 0
12/28/2010	5:20:11 PM	Helium valve closed
12/28/2010	5:20:11 PM	H2 valve closed
12/28/2010	5:20:11 PM	BCl3 valve closed
12/28/2010	5:20:11 PM	PH3 valve closed
12/28/2010	5:20:11 PM	SiCl4 pre valve closed
12/28/2010	5:20:11 PM	SiCl4 post valve closed
12/28/2010	5:20:11 PM	Main Vac valve closed
12/28/2010	5:20:11 PM	Bypass valve closed
12/28/2010	5:20:11 PM	Bubbler valve closed
12/28/2010	5:20:11 PM	Helium MFC set to  0.000000
12/28/2010	5:20:11 PM	H2 MFC set to  0.000000
12/28/2010	5:20:11 PM	BCl3 MFC set to  0.000000
12/28/2010	5:20:11 PM	PHl3 MFC set to  0.000000
12/28/2010	5:20:11 PM	SiCl4 MFC set to  0.000000
12/28/2010	5:20:11 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	5:20:11 PM	Tube furnace set to 0
12/28/2010	5:20:11 PM	Run finished at 5:20 PM
12/28/2010	5:20:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/28/2010	6:49:46 PM	Program started after a nonstandard shutdown
12/28/2010	6:49:46 PM	Helium valve closed
12/28/2010	6:49:46 PM	H2 valve closed
12/28/2010	6:49:46 PM	BCl3 valve closed
12/28/2010	6:49:46 PM	PH3 valve closed
12/28/2010	6:49:46 PM	SiCl4 pre valve closed
12/28/2010	6:49:46 PM	SiCl4 post valve closed
12/28/2010	6:49:46 PM	Main Vac valve closed
12/28/2010	6:49:46 PM	Bypass valve closed
12/28/2010	6:49:46 PM	Bubbler valve closed
12/28/2010	6:49:46 PM	Helium MFC set to  0.000000
12/28/2010	6:49:46 PM	H2 MFC set to  0.000000
12/28/2010	6:49:46 PM	BCl3 MFC set to  0.000000
12/28/2010	6:49:46 PM	PHl3 MFC set to  0.000000
12/28/2010	6:49:46 PM	SiCl4 MFC set to  0.000000
12/28/2010	6:49:46 PM	Bypass solenoid MFC set to  760.000000
12/28/2010	6:49:46 PM	Tube furnace set to 0
12/28/2010	6:52:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	6:52:37 PM	Recipe started at 6:52 PM
12/28/2010	6:52:37 PM	Helium valve closed
12/28/2010	6:52:37 PM	H2 valve closed
12/28/2010	6:52:37 PM	BCl3 valve closed
12/28/2010	6:52:37 PM	PH3 valve closed
12/28/2010	6:52:37 PM	SiCl4 pre valve closed
12/28/2010	6:52:37 PM	SiCl4 post valve closed
12/28/2010	6:52:37 PM	Main Vac valve closed
12/28/2010	6:52:37 PM	Bubbler valve closed
12/28/2010	6:52:37 PM	Bypass valve opened
12/28/2010	6:52:37 PM	Helium MFC set to  0.000000
12/28/2010	6:52:37 PM	H2 MFC set to  0.000000
12/28/2010	6:52:37 PM	BCl3 MFC set to  0.000000
12/28/2010	6:52:37 PM	PHl3 MFC set to  0.000000
12/28/2010	6:52:37 PM	SiCl4 MFC set to  0.000000
12/28/2010	6:52:37 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	6:52:37 PM	Tube furnace set to 0
12/28/2010	6:53:44 PM	Run aborted at 6:53 PM
12/28/2010	6:53:44 PM	Helium valve closed
12/28/2010	6:53:44 PM	H2 valve closed
12/28/2010	6:53:44 PM	BCl3 valve closed
12/28/2010	6:53:44 PM	PH3 valve closed
12/28/2010	6:53:44 PM	SiCl4 pre valve closed
12/28/2010	6:53:44 PM	SiCl4 post valve closed
12/28/2010	6:53:44 PM	Bypass valve closed
12/28/2010	6:53:44 PM	Main Vac valve closed
12/28/2010	6:53:44 PM	Bubbler valve closed
12/28/2010	6:53:44 PM	Helium MFC set to  0.000000
12/28/2010	6:53:44 PM	H2 MFC set to  0.000000
12/28/2010	6:53:44 PM	BCl3 MFC set to  0.000000
12/28/2010	6:53:44 PM	PHl3 MFC set to  0.000000
12/28/2010	6:53:44 PM	SiCl4 MFC set to  0.000000
12/28/2010	6:53:44 PM	Tube furnace set to 0
12/28/2010	6:53:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	6:53:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	6:53:56 PM	Recipe started at 6:53 PM
12/28/2010	6:53:56 PM	Helium valve closed
12/28/2010	6:53:56 PM	H2 valve closed
12/28/2010	6:53:56 PM	BCl3 valve closed
12/28/2010	6:53:56 PM	PH3 valve closed
12/28/2010	6:53:56 PM	SiCl4 pre valve closed
12/28/2010	6:53:56 PM	SiCl4 post valve closed
12/28/2010	6:53:56 PM	Main Vac valve closed
12/28/2010	6:53:56 PM	Bubbler valve closed
12/28/2010	6:53:56 PM	Bypass valve opened
12/28/2010	6:53:56 PM	Helium MFC set to  0.000000
12/28/2010	6:53:56 PM	H2 MFC set to  0.000000
12/28/2010	6:53:56 PM	BCl3 MFC set to  0.000000
12/28/2010	6:53:56 PM	PHl3 MFC set to  0.000000
12/28/2010	6:53:56 PM	SiCl4 MFC set to  0.000000
12/28/2010	6:53:56 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	6:53:56 PM	Tube furnace set to 0
12/28/2010	6:55:05 PM	Helium valve closed
12/28/2010	6:55:05 PM	H2 valve closed
12/28/2010	6:55:05 PM	BCl3 valve closed
12/28/2010	6:55:05 PM	PH3 valve closed
12/28/2010	6:55:05 PM	SiCl4 pre valve closed
12/28/2010	6:55:05 PM	SiCl4 post valve closed
12/28/2010	6:55:05 PM	Bubbler valve closed
12/28/2010	6:55:05 PM	Main Vac valve opened
12/28/2010	6:55:05 PM	Bypass valve opened
12/28/2010	6:55:05 PM	Helium MFC set to  0.000000
12/28/2010	6:55:05 PM	H2 MFC set to  0.000000
12/28/2010	6:55:05 PM	BCl3 MFC set to  0.000000
12/28/2010	6:55:05 PM	PHl3 MFC set to  0.000000
12/28/2010	6:55:05 PM	SiCl4 MFC set to  0.000000
12/28/2010	6:55:05 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	6:55:05 PM	Tube furnace set to 0
12/28/2010	6:55:06 PM	Run finished at 6:55 PM
12/28/2010	6:55:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/28/2010	6:59:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	6:59:56 PM	Recipe started at 6:59 PM
12/28/2010	6:59:56 PM	Helium valve closed
12/28/2010	6:59:56 PM	H2 valve closed
12/28/2010	6:59:56 PM	BCl3 valve closed
12/28/2010	6:59:56 PM	PH3 valve closed
12/28/2010	6:59:56 PM	SiCl4 pre valve closed
12/28/2010	6:59:56 PM	SiCl4 post valve closed
12/28/2010	6:59:56 PM	Main Vac valve closed
12/28/2010	6:59:56 PM	Bypass valve closed
12/28/2010	6:59:56 PM	Bubbler valve closed
12/28/2010	6:59:56 PM	Helium MFC set to  0.000000
12/28/2010	6:59:56 PM	H2 MFC set to  0.000000
12/28/2010	6:59:56 PM	BCl3 MFC set to  0.000000
12/28/2010	6:59:56 PM	PHl3 MFC set to  0.000000
12/28/2010	6:59:56 PM	SiCl4 MFC set to  0.000000
12/28/2010	6:59:56 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	6:59:56 PM	Tube furnace set to 0
12/28/2010	6:59:56 PM	Run finished at 6:59 PM
12/28/2010	6:59:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	7:00:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	7:00:25 PM	Recipe started at 7:00 PM
12/28/2010	7:00:25 PM	Helium valve closed
12/28/2010	7:00:25 PM	H2 valve closed
12/28/2010	7:00:25 PM	BCl3 valve closed
12/28/2010	7:00:25 PM	PH3 valve closed
12/28/2010	7:00:25 PM	SiCl4 pre valve closed
12/28/2010	7:00:25 PM	SiCl4 post valve closed
12/28/2010	7:00:25 PM	Main Vac valve closed
12/28/2010	7:00:25 PM	Bubbler valve closed
12/28/2010	7:00:25 PM	Bypass valve opened
12/28/2010	7:00:25 PM	Helium MFC set to  0.000000
12/28/2010	7:00:25 PM	H2 MFC set to  0.000000
12/28/2010	7:00:25 PM	BCl3 MFC set to  0.000000
12/28/2010	7:00:25 PM	PHl3 MFC set to  0.000000
12/28/2010	7:00:25 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:00:25 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:00:25 PM	Tube furnace set to 0
12/28/2010	7:00:25 PM	Helium valve closed
12/28/2010	7:00:25 PM	H2 valve closed
12/28/2010	7:00:25 PM	BCl3 valve closed
12/28/2010	7:00:25 PM	PH3 valve closed
12/28/2010	7:00:25 PM	SiCl4 pre valve closed
12/28/2010	7:00:25 PM	SiCl4 post valve closed
12/28/2010	7:00:25 PM	Bubbler valve closed
12/28/2010	7:00:25 PM	Main Vac valve opened
12/28/2010	7:00:25 PM	Bypass valve opened
12/28/2010	7:00:25 PM	Helium MFC set to  0.000000
12/28/2010	7:00:25 PM	H2 MFC set to  0.000000
12/28/2010	7:00:25 PM	BCl3 MFC set to  0.000000
12/28/2010	7:00:25 PM	PHl3 MFC set to  0.000000
12/28/2010	7:00:25 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:00:25 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:00:25 PM	Tube furnace set to 0
12/28/2010	7:01:25 PM	H2 valve closed
12/28/2010	7:01:25 PM	BCl3 valve closed
12/28/2010	7:01:25 PM	PH3 valve closed
12/28/2010	7:01:25 PM	SiCl4 pre valve closed
12/28/2010	7:01:25 PM	SiCl4 post valve closed
12/28/2010	7:01:25 PM	Bubbler valve closed
12/28/2010	7:01:25 PM	Helium valve opened
12/28/2010	7:01:25 PM	Main Vac valve opened
12/28/2010	7:01:25 PM	Bypass valve opened
12/28/2010	7:01:25 PM	Helium MFC set to  100.000000
12/28/2010	7:01:25 PM	H2 MFC set to  0.000000
12/28/2010	7:01:25 PM	BCl3 MFC set to  0.000000
12/28/2010	7:01:25 PM	PHl3 MFC set to  0.000000
12/28/2010	7:01:25 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:01:25 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:01:26 PM	Tube furnace set to 0
12/28/2010	7:02:26 PM	Helium valve closed
12/28/2010	7:02:26 PM	H2 valve closed
12/28/2010	7:02:26 PM	BCl3 valve closed
12/28/2010	7:02:26 PM	PH3 valve closed
12/28/2010	7:02:26 PM	SiCl4 pre valve closed
12/28/2010	7:02:26 PM	SiCl4 post valve closed
12/28/2010	7:02:26 PM	Bubbler valve closed
12/28/2010	7:02:26 PM	Main Vac valve opened
12/28/2010	7:02:26 PM	Bypass valve opened
12/28/2010	7:02:26 PM	Helium MFC set to  0.000000
12/28/2010	7:02:26 PM	H2 MFC set to  0.000000
12/28/2010	7:02:26 PM	BCl3 MFC set to  0.000000
12/28/2010	7:02:26 PM	PHl3 MFC set to  0.000000
12/28/2010	7:02:26 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:02:26 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:02:26 PM	Tube furnace set to 0
12/28/2010	7:03:26 PM	H2 valve closed
12/28/2010	7:03:26 PM	BCl3 valve closed
12/28/2010	7:03:26 PM	PH3 valve closed
12/28/2010	7:03:26 PM	SiCl4 pre valve closed
12/28/2010	7:03:26 PM	SiCl4 post valve closed
12/28/2010	7:03:26 PM	Bubbler valve closed
12/28/2010	7:03:26 PM	Helium valve opened
12/28/2010	7:03:26 PM	Main Vac valve opened
12/28/2010	7:03:26 PM	Bypass valve opened
12/28/2010	7:03:26 PM	Helium MFC set to  100.000000
12/28/2010	7:03:26 PM	H2 MFC set to  0.000000
12/28/2010	7:03:26 PM	BCl3 MFC set to  0.000000
12/28/2010	7:03:26 PM	PHl3 MFC set to  0.000000
12/28/2010	7:03:26 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:03:26 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:03:26 PM	Tube furnace set to 0
12/28/2010	7:04:26 PM	Helium valve closed
12/28/2010	7:04:26 PM	H2 valve closed
12/28/2010	7:04:26 PM	BCl3 valve closed
12/28/2010	7:04:26 PM	PH3 valve closed
12/28/2010	7:04:26 PM	SiCl4 pre valve closed
12/28/2010	7:04:26 PM	SiCl4 post valve closed
12/28/2010	7:04:26 PM	Bubbler valve closed
12/28/2010	7:04:26 PM	Main Vac valve opened
12/28/2010	7:04:26 PM	Bypass valve opened
12/28/2010	7:04:26 PM	Helium MFC set to  0.000000
12/28/2010	7:04:26 PM	H2 MFC set to  0.000000
12/28/2010	7:04:26 PM	BCl3 MFC set to  0.000000
12/28/2010	7:04:26 PM	PHl3 MFC set to  0.000000
12/28/2010	7:04:26 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:04:26 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:04:26 PM	Tube furnace set to 0
12/28/2010	7:05:26 PM	H2 valve closed
12/28/2010	7:05:26 PM	BCl3 valve closed
12/28/2010	7:05:26 PM	PH3 valve closed
12/28/2010	7:05:26 PM	SiCl4 pre valve closed
12/28/2010	7:05:26 PM	SiCl4 post valve closed
12/28/2010	7:05:26 PM	Bubbler valve closed
12/28/2010	7:05:26 PM	Helium valve opened
12/28/2010	7:05:26 PM	Main Vac valve opened
12/28/2010	7:05:26 PM	Bypass valve opened
12/28/2010	7:05:26 PM	Helium MFC set to  100.000000
12/28/2010	7:05:26 PM	H2 MFC set to  0.000000
12/28/2010	7:05:26 PM	BCl3 MFC set to  0.000000
12/28/2010	7:05:26 PM	PHl3 MFC set to  0.000000
12/28/2010	7:05:26 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:05:26 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:05:26 PM	Tube furnace set to 0
12/28/2010	7:06:26 PM	Helium valve closed
12/28/2010	7:06:26 PM	H2 valve closed
12/28/2010	7:06:26 PM	BCl3 valve closed
12/28/2010	7:06:26 PM	PH3 valve closed
12/28/2010	7:06:26 PM	SiCl4 pre valve closed
12/28/2010	7:06:26 PM	SiCl4 post valve closed
12/28/2010	7:06:26 PM	Bubbler valve closed
12/28/2010	7:06:26 PM	Main Vac valve opened
12/28/2010	7:06:26 PM	Bypass valve opened
12/28/2010	7:06:26 PM	Helium MFC set to  0.000000
12/28/2010	7:06:26 PM	H2 MFC set to  0.000000
12/28/2010	7:06:26 PM	BCl3 MFC set to  0.000000
12/28/2010	7:06:26 PM	PHl3 MFC set to  0.000000
12/28/2010	7:06:26 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:06:26 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:06:27 PM	Tube furnace set to 0
12/28/2010	7:07:27 PM	H2 valve closed
12/28/2010	7:07:27 PM	BCl3 valve closed
12/28/2010	7:07:27 PM	PH3 valve closed
12/28/2010	7:07:27 PM	SiCl4 pre valve closed
12/28/2010	7:07:27 PM	SiCl4 post valve closed
12/28/2010	7:07:27 PM	Bubbler valve closed
12/28/2010	7:07:27 PM	Helium valve opened
12/28/2010	7:07:27 PM	Main Vac valve opened
12/28/2010	7:07:27 PM	Bypass valve opened
12/28/2010	7:07:27 PM	Helium MFC set to  100.000000
12/28/2010	7:07:27 PM	H2 MFC set to  0.000000
12/28/2010	7:07:27 PM	BCl3 MFC set to  0.000000
12/28/2010	7:07:27 PM	PHl3 MFC set to  0.000000
12/28/2010	7:07:27 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:07:27 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:07:27 PM	Tube furnace set to 0
12/28/2010	7:08:27 PM	Helium valve closed
12/28/2010	7:08:27 PM	H2 valve closed
12/28/2010	7:08:27 PM	BCl3 valve closed
12/28/2010	7:08:27 PM	PH3 valve closed
12/28/2010	7:08:27 PM	SiCl4 pre valve closed
12/28/2010	7:08:27 PM	SiCl4 post valve closed
12/28/2010	7:08:27 PM	Bubbler valve closed
12/28/2010	7:08:27 PM	Main Vac valve opened
12/28/2010	7:08:27 PM	Bypass valve opened
12/28/2010	7:08:27 PM	Helium MFC set to  0.000000
12/28/2010	7:08:27 PM	H2 MFC set to  0.000000
12/28/2010	7:08:27 PM	BCl3 MFC set to  0.000000
12/28/2010	7:08:27 PM	PHl3 MFC set to  0.000000
12/28/2010	7:08:27 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:08:27 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:08:27 PM	Tube furnace set to 0
12/28/2010	7:09:27 PM	H2 valve closed
12/28/2010	7:09:27 PM	BCl3 valve closed
12/28/2010	7:09:27 PM	PH3 valve closed
12/28/2010	7:09:27 PM	SiCl4 pre valve closed
12/28/2010	7:09:27 PM	SiCl4 post valve closed
12/28/2010	7:09:27 PM	Bubbler valve closed
12/28/2010	7:09:27 PM	Helium valve opened
12/28/2010	7:09:27 PM	Main Vac valve opened
12/28/2010	7:09:27 PM	Bypass valve opened
12/28/2010	7:09:27 PM	Helium MFC set to  100.000000
12/28/2010	7:09:27 PM	H2 MFC set to  0.000000
12/28/2010	7:09:27 PM	BCl3 MFC set to  0.000000
12/28/2010	7:09:27 PM	PHl3 MFC set to  0.000000
12/28/2010	7:09:27 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:09:27 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:09:27 PM	Tube furnace set to 0
12/28/2010	7:10:27 PM	Helium valve closed
12/28/2010	7:10:27 PM	H2 valve closed
12/28/2010	7:10:27 PM	BCl3 valve closed
12/28/2010	7:10:27 PM	PH3 valve closed
12/28/2010	7:10:27 PM	SiCl4 pre valve closed
12/28/2010	7:10:27 PM	SiCl4 post valve closed
12/28/2010	7:10:27 PM	Bubbler valve closed
12/28/2010	7:10:27 PM	Main Vac valve opened
12/28/2010	7:10:27 PM	Bypass valve opened
12/28/2010	7:10:27 PM	Helium MFC set to  0.000000
12/28/2010	7:10:27 PM	H2 MFC set to  0.000000
12/28/2010	7:10:27 PM	BCl3 MFC set to  0.000000
12/28/2010	7:10:27 PM	PHl3 MFC set to  0.000000
12/28/2010	7:10:27 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:10:27 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:10:27 PM	Tube furnace set to 0
12/28/2010	7:11:27 PM	H2 valve closed
12/28/2010	7:11:27 PM	BCl3 valve closed
12/28/2010	7:11:27 PM	PH3 valve closed
12/28/2010	7:11:27 PM	SiCl4 pre valve closed
12/28/2010	7:11:27 PM	SiCl4 post valve closed
12/28/2010	7:11:27 PM	Bubbler valve closed
12/28/2010	7:11:27 PM	Helium valve opened
12/28/2010	7:11:27 PM	Main Vac valve opened
12/28/2010	7:11:27 PM	Bypass valve opened
12/28/2010	7:11:27 PM	Helium MFC set to  100.000000
12/28/2010	7:11:27 PM	H2 MFC set to  0.000000
12/28/2010	7:11:27 PM	BCl3 MFC set to  0.000000
12/28/2010	7:11:27 PM	PHl3 MFC set to  0.000000
12/28/2010	7:11:27 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:11:27 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:11:28 PM	Tube furnace set to 0
12/28/2010	7:12:28 PM	Helium valve closed
12/28/2010	7:12:28 PM	H2 valve closed
12/28/2010	7:12:28 PM	BCl3 valve closed
12/28/2010	7:12:28 PM	PH3 valve closed
12/28/2010	7:12:28 PM	SiCl4 pre valve closed
12/28/2010	7:12:28 PM	SiCl4 post valve closed
12/28/2010	7:12:28 PM	Bubbler valve closed
12/28/2010	7:12:28 PM	Main Vac valve opened
12/28/2010	7:12:28 PM	Bypass valve opened
12/28/2010	7:12:28 PM	Helium MFC set to  0.000000
12/28/2010	7:12:28 PM	H2 MFC set to  0.000000
12/28/2010	7:12:28 PM	BCl3 MFC set to  0.000000
12/28/2010	7:12:28 PM	PHl3 MFC set to  0.000000
12/28/2010	7:12:28 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:12:28 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:12:28 PM	Tube furnace set to 0
12/28/2010	7:13:28 PM	H2 valve closed
12/28/2010	7:13:28 PM	BCl3 valve closed
12/28/2010	7:13:28 PM	PH3 valve closed
12/28/2010	7:13:28 PM	SiCl4 pre valve closed
12/28/2010	7:13:28 PM	SiCl4 post valve closed
12/28/2010	7:13:28 PM	Bubbler valve closed
12/28/2010	7:13:28 PM	Helium valve opened
12/28/2010	7:13:28 PM	Main Vac valve opened
12/28/2010	7:13:28 PM	Bypass valve opened
12/28/2010	7:13:28 PM	Helium MFC set to  100.000000
12/28/2010	7:13:28 PM	H2 MFC set to  0.000000
12/28/2010	7:13:28 PM	BCl3 MFC set to  0.000000
12/28/2010	7:13:28 PM	PHl3 MFC set to  0.000000
12/28/2010	7:13:28 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:13:28 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:13:28 PM	Tube furnace set to 0
12/28/2010	7:14:28 PM	Helium valve closed
12/28/2010	7:14:28 PM	H2 valve closed
12/28/2010	7:14:28 PM	BCl3 valve closed
12/28/2010	7:14:28 PM	PH3 valve closed
12/28/2010	7:14:28 PM	SiCl4 pre valve closed
12/28/2010	7:14:28 PM	SiCl4 post valve closed
12/28/2010	7:14:28 PM	Bubbler valve closed
12/28/2010	7:14:28 PM	Main Vac valve opened
12/28/2010	7:14:28 PM	Bypass valve opened
12/28/2010	7:14:28 PM	Helium MFC set to  0.000000
12/28/2010	7:14:28 PM	H2 MFC set to  0.000000
12/28/2010	7:14:28 PM	BCl3 MFC set to  0.000000
12/28/2010	7:14:28 PM	PHl3 MFC set to  0.000000
12/28/2010	7:14:28 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:14:28 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:14:28 PM	Tube furnace set to 0
12/28/2010	7:15:28 PM	H2 valve closed
12/28/2010	7:15:28 PM	BCl3 valve closed
12/28/2010	7:15:28 PM	PH3 valve closed
12/28/2010	7:15:28 PM	SiCl4 pre valve closed
12/28/2010	7:15:28 PM	SiCl4 post valve closed
12/28/2010	7:15:28 PM	Bubbler valve closed
12/28/2010	7:15:28 PM	Helium valve opened
12/28/2010	7:15:28 PM	Main Vac valve opened
12/28/2010	7:15:28 PM	Bypass valve opened
12/28/2010	7:15:28 PM	Helium MFC set to  100.000000
12/28/2010	7:15:28 PM	H2 MFC set to  0.000000
12/28/2010	7:15:28 PM	BCl3 MFC set to  0.000000
12/28/2010	7:15:28 PM	PHl3 MFC set to  0.000000
12/28/2010	7:15:28 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:15:28 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:15:28 PM	Tube furnace set to 0
12/28/2010	7:16:28 PM	Helium valve closed
12/28/2010	7:16:28 PM	H2 valve closed
12/28/2010	7:16:28 PM	BCl3 valve closed
12/28/2010	7:16:28 PM	PH3 valve closed
12/28/2010	7:16:28 PM	SiCl4 pre valve closed
12/28/2010	7:16:28 PM	SiCl4 post valve closed
12/28/2010	7:16:28 PM	Bubbler valve closed
12/28/2010	7:16:28 PM	Main Vac valve opened
12/28/2010	7:16:28 PM	Bypass valve opened
12/28/2010	7:16:28 PM	Helium MFC set to  0.000000
12/28/2010	7:16:28 PM	H2 MFC set to  0.000000
12/28/2010	7:16:28 PM	BCl3 MFC set to  0.000000
12/28/2010	7:16:28 PM	PHl3 MFC set to  0.000000
12/28/2010	7:16:28 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:16:28 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:16:29 PM	Tube furnace set to 0
12/28/2010	7:17:29 PM	H2 valve closed
12/28/2010	7:17:29 PM	BCl3 valve closed
12/28/2010	7:17:29 PM	PH3 valve closed
12/28/2010	7:17:29 PM	SiCl4 pre valve closed
12/28/2010	7:17:29 PM	SiCl4 post valve closed
12/28/2010	7:17:29 PM	Bubbler valve closed
12/28/2010	7:17:29 PM	Helium valve opened
12/28/2010	7:17:29 PM	Main Vac valve opened
12/28/2010	7:17:29 PM	Bypass valve opened
12/28/2010	7:17:29 PM	Helium MFC set to  100.000000
12/28/2010	7:17:29 PM	H2 MFC set to  0.000000
12/28/2010	7:17:29 PM	BCl3 MFC set to  0.000000
12/28/2010	7:17:29 PM	PHl3 MFC set to  0.000000
12/28/2010	7:17:29 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:17:29 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:17:29 PM	Tube furnace set to 0
12/28/2010	7:18:29 PM	Helium valve closed
12/28/2010	7:18:29 PM	H2 valve closed
12/28/2010	7:18:29 PM	BCl3 valve closed
12/28/2010	7:18:29 PM	PH3 valve closed
12/28/2010	7:18:29 PM	SiCl4 pre valve closed
12/28/2010	7:18:29 PM	SiCl4 post valve closed
12/28/2010	7:18:29 PM	Bubbler valve closed
12/28/2010	7:18:29 PM	Main Vac valve opened
12/28/2010	7:18:29 PM	Bypass valve opened
12/28/2010	7:18:29 PM	Helium MFC set to  0.000000
12/28/2010	7:18:29 PM	H2 MFC set to  0.000000
12/28/2010	7:18:29 PM	BCl3 MFC set to  0.000000
12/28/2010	7:18:29 PM	PHl3 MFC set to  0.000000
12/28/2010	7:18:29 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:18:29 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:18:29 PM	Tube furnace set to 0
12/28/2010	7:19:29 PM	H2 valve closed
12/28/2010	7:19:29 PM	BCl3 valve closed
12/28/2010	7:19:29 PM	PH3 valve closed
12/28/2010	7:19:29 PM	SiCl4 pre valve closed
12/28/2010	7:19:29 PM	SiCl4 post valve closed
12/28/2010	7:19:29 PM	Bubbler valve closed
12/28/2010	7:19:29 PM	Helium valve opened
12/28/2010	7:19:29 PM	Main Vac valve opened
12/28/2010	7:19:29 PM	Bypass valve opened
12/28/2010	7:19:29 PM	Helium MFC set to  100.000000
12/28/2010	7:19:29 PM	H2 MFC set to  0.000000
12/28/2010	7:19:29 PM	BCl3 MFC set to  0.000000
12/28/2010	7:19:29 PM	PHl3 MFC set to  0.000000
12/28/2010	7:19:29 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:19:29 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:19:29 PM	Tube furnace set to 0
12/28/2010	7:20:29 PM	Helium valve closed
12/28/2010	7:20:29 PM	H2 valve closed
12/28/2010	7:20:29 PM	BCl3 valve closed
12/28/2010	7:20:29 PM	PH3 valve closed
12/28/2010	7:20:29 PM	SiCl4 pre valve closed
12/28/2010	7:20:29 PM	SiCl4 post valve closed
12/28/2010	7:20:29 PM	Bubbler valve closed
12/28/2010	7:20:29 PM	Main Vac valve opened
12/28/2010	7:20:29 PM	Bypass valve opened
12/28/2010	7:20:29 PM	Helium MFC set to  0.000000
12/28/2010	7:20:29 PM	H2 MFC set to  0.000000
12/28/2010	7:20:29 PM	BCl3 MFC set to  0.000000
12/28/2010	7:20:29 PM	PHl3 MFC set to  0.000000
12/28/2010	7:20:29 PM	SiCl4 MFC set to  0.000000
12/28/2010	7:20:29 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	7:20:29 PM	Tube furnace set to 0
12/28/2010	7:20:30 PM	Run finished at 7:20 PM
12/28/2010	7:20:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/28/2010	10:38:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	10:38:12 PM	Recipe started at 10:38 PM
12/28/2010	10:38:12 PM	Helium valve closed
12/28/2010	10:38:12 PM	H2 valve closed
12/28/2010	10:38:12 PM	BCl3 valve closed
12/28/2010	10:38:12 PM	PH3 valve closed
12/28/2010	10:38:12 PM	SiCl4 pre valve closed
12/28/2010	10:38:12 PM	SiCl4 post valve closed
12/28/2010	10:38:12 PM	Main Vac valve closed
12/28/2010	10:38:12 PM	Bypass valve closed
12/28/2010	10:38:12 PM	Bubbler valve closed
12/28/2010	10:38:12 PM	Helium MFC set to  0.000000
12/28/2010	10:38:12 PM	H2 MFC set to  0.000000
12/28/2010	10:38:12 PM	BCl3 MFC set to  0.000000
12/28/2010	10:38:12 PM	PHl3 MFC set to  0.000000
12/28/2010	10:38:12 PM	SiCl4 MFC set to  0.000000
12/28/2010	10:38:12 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	10:38:13 PM	Tube furnace set to 0
12/28/2010	10:38:13 PM	Run finished at 10:38 PM
12/28/2010	10:38:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/28/2010	10:39:09 PM	Recipe started at 10:39 PM
12/28/2010	10:39:09 PM	Helium valve closed
12/28/2010	10:39:09 PM	BCl3 valve closed
12/28/2010	10:39:09 PM	PH3 valve closed
12/28/2010	10:39:09 PM	SiCl4 pre valve closed
12/28/2010	10:39:09 PM	SiCl4 post valve closed
12/28/2010	10:39:09 PM	Main Vac valve closed
12/28/2010	10:39:09 PM	Bypass valve closed
12/28/2010	10:39:09 PM	Bubbler valve closed
12/28/2010	10:39:09 PM	H2 valve opened
12/28/2010	10:39:09 PM	Helium MFC set to  0.000000
12/28/2010	10:39:09 PM	H2 MFC set to  500.000000
12/28/2010	10:39:09 PM	BCl3 MFC set to  0.000000
12/28/2010	10:39:09 PM	PHl3 MFC set to  0.000000
12/28/2010	10:39:09 PM	SiCl4 MFC set to  0.000000
12/28/2010	10:39:09 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	10:39:09 PM	Tube furnace set to 100
12/28/2010	10:40:29 PM	Helium valve closed
12/28/2010	10:40:29 PM	BCl3 valve closed
12/28/2010	10:40:29 PM	PH3 valve closed
12/28/2010	10:40:29 PM	SiCl4 pre valve closed
12/28/2010	10:40:29 PM	SiCl4 post valve closed
12/28/2010	10:40:29 PM	Main Vac valve closed
12/28/2010	10:40:29 PM	Bypass valve closed
12/28/2010	10:40:29 PM	H2 valve opened
12/28/2010	10:40:29 PM	Bubbler valve opened
12/28/2010	10:40:29 PM	Helium MFC set to  0.000000
12/28/2010	10:40:29 PM	H2 MFC set to  500.000000
12/28/2010	10:40:29 PM	BCl3 MFC set to  0.000000
12/28/2010	10:40:29 PM	PHl3 MFC set to  0.000000
12/28/2010	10:40:29 PM	SiCl4 MFC set to  0.000000
12/28/2010	10:40:29 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	10:40:30 PM	Tube furnace set to 1000
12/28/2010	11:00:30 PM	Helium valve closed
12/28/2010	11:00:30 PM	PH3 valve closed
12/28/2010	11:00:30 PM	Main Vac valve closed
12/28/2010	11:00:30 PM	Bypass valve closed
12/28/2010	11:00:30 PM	H2 valve opened
12/28/2010	11:00:30 PM	BCl3 valve opened
12/28/2010	11:00:30 PM	SiCl4 pre valve opened
12/28/2010	11:00:30 PM	SiCl4 post valve opened
12/28/2010	11:00:30 PM	Bubbler valve opened
12/28/2010	11:00:30 PM	Helium MFC set to  0.000000
12/28/2010	11:00:30 PM	H2 MFC set to  500.000000
12/28/2010	11:00:30 PM	BCl3 MFC set to  3.000000
12/28/2010	11:00:30 PM	PHl3 MFC set to  0.000000
12/28/2010	11:00:30 PM	SiCl4 MFC set to  50.000000
12/28/2010	11:00:30 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	11:00:30 PM	Tube furnace set to 1000
12/28/2010	11:20:30 PM	H2 valve closed
12/28/2010	11:20:30 PM	BCl3 valve closed
12/28/2010	11:20:30 PM	PH3 valve closed
12/28/2010	11:20:30 PM	SiCl4 pre valve closed
12/28/2010	11:20:30 PM	SiCl4 post valve closed
12/28/2010	11:20:30 PM	Main Vac valve closed
12/28/2010	11:20:30 PM	Bypass valve closed
12/28/2010	11:20:30 PM	Helium valve opened
12/28/2010	11:20:30 PM	Bubbler valve opened
12/28/2010	11:20:30 PM	Helium MFC set to  500.000000
12/28/2010	11:20:30 PM	H2 MFC set to  0.000000
12/28/2010	11:20:30 PM	BCl3 MFC set to  0.000000
12/28/2010	11:20:30 PM	PHl3 MFC set to  0.000000
12/28/2010	11:20:30 PM	SiCl4 MFC set to  0.000000
12/28/2010	11:20:30 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	11:20:30 PM	Tube furnace set to 0
12/28/2010	11:40:30 PM	Helium valve closed
12/28/2010	11:40:30 PM	H2 valve closed
12/28/2010	11:40:30 PM	BCl3 valve closed
12/28/2010	11:40:30 PM	PH3 valve closed
12/28/2010	11:40:30 PM	SiCl4 pre valve closed
12/28/2010	11:40:30 PM	SiCl4 post valve closed
12/28/2010	11:40:30 PM	Main Vac valve closed
12/28/2010	11:40:30 PM	Bypass valve closed
12/28/2010	11:40:30 PM	Bubbler valve closed
12/28/2010	11:40:30 PM	Helium MFC set to  0.000000
12/28/2010	11:40:30 PM	H2 MFC set to  0.000000
12/28/2010	11:40:30 PM	BCl3 MFC set to  0.000000
12/28/2010	11:40:30 PM	PHl3 MFC set to  0.000000
12/28/2010	11:40:30 PM	SiCl4 MFC set to  0.000000
12/28/2010	11:40:30 PM	Bypass solenoid MFC set to  0.000000
12/28/2010	11:40:30 PM	Tube furnace set to 0
12/28/2010	11:40:30 PM	Run finished at 11:40 PM
